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《Chinese Journal of Sensors and Actuators》 2009-06
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Study on Design and Experimentation of Piezoelectric Micro-Moving Platform with Nano-Step and Long-Range

HU Changde1,ZHAO Meirong2,LI Yongqiang1,GAO Juan1,ZHU Sha11.the Academy of Equipment Command & Technology,Changping Beijing 102200 China;2.State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072 China  
A kind of piezoelectric micro-moving platform with long-range and nano-step has been developed,which is based on inchworm motion.The clampers and actuators which are made of piezoelectric ceramic are both disposed in symmetrical relationship.By clamping or releasing of clampers and extending or retracting of actuators,it could achieve a kind of push-pull relay movement.In this way,the movement of platform is smooth and continuous.With the proper four-channels driving signals,the platform is moved linearly with single step or multi-step.The performances of the platform are tested through experiments.The results show that the motion of the platform is linear,the moving speed can reach 13.9μm/s at the voltage of 200V and the minimal step is less than 10 nm,the moving range is more than 20 mm.
【Fund】: 国家自然科学基金项目资助(50105016)“大范围实用型二维纳米定位控制及测量技术”
【CateGory Index】: TP273
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【References】
Chinese Journal Full-text Database 3 Hits
1 YANG Lei,QI Yao-guang,FAN Jin-wei,et al.(1.College of Machinery and Electronic Engineering,University of Petroleum(east China),Dongying 2570612.College of Machinery and Electronic Engineering,Beijing University of Technology,Beijing 100022);Research of Precision Preload System for CNC Machine Based on Piezoelectricity Ceramic[J];Aviation Precision Manufacturing Technology;2010-04
2 Lin Chao Yu Songsong Cheng Kai Liu Gang Yu Honghua The State Key Laboratory of Mechanical Transmission,Chongqing University,Chongqing,400044;Design and Analysis of a Long-displacement 5-DOF Nano-transmission Platform[J];China Mechanical Engineering;2010-22
3 Xu Congyu Sun Yaqiong Fang Wenqiong Luo Yang Yuan Hangzhou Hefei University of Technology,Hefei,230009;Design on Adjusting Mechanism for Micro/Nano-Actuation Parameters of Ultrasonic Motor[J];China Mechanical Engineering;2013-07
【Citations】
Chinese Journal Full-text Database 10 Hits
1 Chu Xiangcheng Li Longtu (Dept.of Materials Science & Engineering,Tsinghua University);Recent Progress in Research on Piezo-Ceramic Ultrasonic Motor[J];Materials Review;2001-06
2 SHAN Zhaohui1,LIU Xinyu1,2,ZHOU Changrong1,2(1 Department of Information Material Science and Engineering,Guilin University of Electronic Technology,Guilin 541004;2 College of Material Science and Engineering,Central South University,Changsha 410083);Effect of B-site Complex Ions Substitution on Electric Properties of NBT Lead-free Piezoelectric Ceramics[J];Materials Review;2008-09
3 Fan Wei Yu Xiaofen Xi Lin(School of Instrument Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China);Research on Design of Large Travel Ultra Precision Stage Driven by Piezoceramic Motor[J];Journal of Electronic Measurement and Instrument;2008-02
4 Lu Boyin Zhao Meirong;A Study of New-Style Frictional Slideway with High Accuracy[J];;1992-06
5 WEI Qiang1,ZHANG Yu-lin2(1.Department of Physics and Electronic Science,Taishan University,Tai'an 271021,China;2.Institute of Electron Beam,Shandong University,Jinan 250061,China);Modeling method of micro-displacement stage driven by piezoelectric ceramic[J];Optics and Precision Engineering;2007-10
6 Wang Jianlin (Beijing University of Chemical Technology,Beijing,Chine) Hu Xiaotang (Tianjin niversity);The Current Research of Nanopositioning Technology[J];MACHINE DESIGN AND RESEARCH;2000-01
7 Xu Liming Hu Dejin Deng Qilin Zhao Xiaoming (Shanghai Jiaotong University);STUDY ON PZT MICRO-DISPLACEMENT DRIVING TECHNOLOGY IN PRECISION MACHINING[J];Chinese Journal of Mechanical Engineering;2002-S1
8 Zhao Meirong Wen Limei Lin Yuchi Zhang Yuxiang (State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjing 300072);PIEZOELECTRIC MOTOR WITH LONG-RANGE AND NANO-STEP[J];Chinese Journal of Mechanical Engineering;2004-08
9 CUI Yuguo DONG Weijie SUN Baoyuan YANG Zhixin (Faculty of Engineering, Ningbo University, Ningbo 315211; School of Electrical and Information Engineering, Dalian University of Technology, Dalian 116023; School of Mechanical Engineering, Dalian University of Technology, Dalian 116023);DISPLACEMENT COMPOUNDING CONTROL OF PIEZOELECTRIC MICRO-MOTION WORKTABLE[J];Chinese Journal of Mechanical Engineering;2006-03
10 KWON Chol-ho1,2,LIN Yu-chi1,ZHAO Mei-rong1,QI Yong-yue1(1.State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University,Tianjin 300072,China;2.School of Physics,KIM IL SUNG University,DPR Korea);Finite Element Analysis and Experiment on Long-Travel Piezoelectric Micro-Positioner[J];Journal of Tianjin University;2007-07
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 JI Guo-jin, MA Kui, WANG Lei (China-German College of Tongji University, Shanghai 200092, China);Kinematics analysis on a micro-nano-manipulator[J];Micronanoelectronic Technology;2003-03
2 KWON Chol-ho1,2,LIN Yu-chi1,ZHAO Mei-rong1,RI Kwang-son2,QI Yong-yue1(1.State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University,Tianjin 300072,China;2.School of Physics,KIM IL SUNG University,D.P.R.Korea);Study on characteristic of long-travel piezoelectric micro-positioner[J];Transducer and Microsystem Technologies;2008-02
3 QI Yong-yue,LIN Yu-chi,ZHANG Li,ZHAO Mei-rong(State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University,Tianjin 300072,China);Study on piezoelectric micro-motion stage at nanometer-scale[J];Transducer and Microsystem Technologies;2009-06
4 ZHANG Li,LIN Yu-chi,ZHAO Mei-rong,QI Yong-yue,QIN Feng(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China);Research on circular grating rotary piezoelectric micro-angle actuator[J];Transducer and Microsystem Technologies;2010-01
5 WANG Hua,ZHANG Xianmin,DENG Junguang(College of Mechanical Engineering,South China University of Technology,Guangzhou 510640,China);Research on a Precision Positioning Stage Based on Piezoelectric Actuators[J];Journal of Test and Measurement Technology;2007-04
6 CUIYu-guo~(1,2),SUNBao-yuan~(*1),DONGWei-jie~3,YANGZhi-xin~1 ( 1.School of Mech. Eng., Dalian Univ. of Technol., Dalian 116024, China; 2.Inst. of Technol., Ningbo Univ., Ningbo 315211, China; 3.School of Electr. and Inf. Eng., Dalian Univ. of Technol., Dalian 116024, China );Study of coordinate transform model for hysteresis nonlinearity in piezoceramic actuator[J];Journal of Dalian University of Technology;2004-02
7 Xia Ruixue Chen Xiaohuai Lu Rongsheng Yu Qingping (School of Instrumentation Science and Opto-electronic Engineering,Hefei University of Technology,Hefei 230009,China);Research on error detection methods for a novel nano-CMM[J];Journal of Electronic Measurement and Instrument;2010-03
8 Yu Xiaofen Cheng Lingli Hu Jiawen Yu Qing (School of Instrument Science and Optoelectronic Engineering,Hefei University of Technology,Hefei 230009);Dynamic optimization design of large travel 2-dof nano-positioning stage[J];Journal of Electronic Measurement and Instrument;2010-03
9 LIU Jian-fang, YANG Zhi-gang, FAN Zun-qiang, CHENG Guang-ming (Jilin University, Changchun 130025, China);Precise PZT linear step actuator[J];Optics and Precision Engineering;2005-01
10 LIU Guo-song, ZHAO Hong-wei,ZENG Ping, CHENG Guang-ming,YANG Zhi-gang(College of Mechanical Science and Engineering, Jilin University, Changchun 130025,China);Novel sophisticated stepping linear piezoelectric actuator[J];Optics and Precision Engineering;2005-03
China Proceedings of conference Full-text Database 3 Hits
1 Shi Yushu~(1,4) Gao Sitian~(2,4) Lu Mingzhen~(3,4) Cui Jianjun~4 Du Hua~4 (1 College of Metrology Technology and Engineering,China Jiliang University,Hangzhou 310018,China;2 State Key Laboratory of Precision Measuring Technology and Instruments,Tianjing University,Tianjing 300072,China;3 Department of Precision Instruments & Mechanology,Tsinghua University,Beijng 100084,China;4 Division of Metrology in Length and Precision Engineering,National Institute of Metrology,Beijing 100013,P.R.China);New type of optical multi-pass laser interferometer with nanometer resolution[A];[C];2007
2 CUI Hui-rong ,LIN Jia-ming (Department of Optical Engineering ,bit, Beijing 100081);Researches and developments of nanon technique in measurement[A];[C];2004
3 Qi Yongyue Zhao Meirong Lin Yuchi (State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China);Review on Nano-measuring System[A];[C];2003
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 CHENG Hui-bo,SHANG Fei(Sanmenxia Vocational Techinian College,Sanmengxia 472000,China);Least Squares Blind Identification for ARMA Module Using Fast Sampling Outputs[J];Journal of Anyang Institute of Technology;2010-04
2 WANG Yong,CUI Da-fu,XU Li-ning,ZHANG Lu-lu (State Key Lab of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080,China);Design of Digital Controlled Driving Power Supply for Piezoelectric Ceramic Micro-Jet[J];Micronanoelectronic Technology;2007-Z1
3 LIU De-zhong, XU Yi-hua, FEI Ren-yuan, YU Hui-ping, WANG Bo (College of Mechanical Engineering and Applied Electronics Technology, BeiJing Polytechnic University, Beijing 100022, China );Design and Manufacture of the Amplifier Based on Flexible Joint[J];Journal of Beijing Polytechnic University;2001-02
4 LI Yanqing, HAO Defu ( Changchun University of Science and Technology, Changchun 130022. China; Changchun Institute of Optics, Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022. China);Development of Diffraction Grating Manufacture[J];Journal of Changchun Institute of Optics and Fine Mechanics;2003-01
5 JIANG Wen-rui , LU Ze-sheng (School of Mechantronic Engineering, Harbin institute of technology, Harbin 150001, China);A Microactuator with High-Resolution and Large-Stroke Drive Features[J];Chinese Journal of Sensors and Actuators;2006-05
6 KWON Chol-ho1,2,LIN Yu-chi1,TONG Ling-zhi1,KIM Il-guang2,ZHAO Mei-rong1(1.State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University,Tianjin 300072,China;2.School of Physics,KIM IL SUNG University,Pyongyang,D.P.R.Korea);Finite element analysis and experiment for micro-displacement stage of scanning tunneling microscope[J];Transducer and Microsystem Technologies;2008-04
7 HAN Tong-peng,LI Guo-ping,SHEN Jie(Faculty of Engineering,Ningbo University,Ningbo 315211,China);Study on accurate positioning technology of piezoelectric ceramics micro-displacement actuator[J];Transducer and Microsystem Technologies;2010-02
8 Li Hong (Xi'an Petrol Institute);Research on the Super-low Ripple Combination Power-switch[J];Electrotechnical Journal;2000-12
9 ZHU Yu,YIN Wen-sheng,DUAN Guang-hong(Department of Precision Instruments,Tsinghua University);RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY[J];Equipment For Electronic Products Manufacturing;2004-02
10 Liu Xiaobo Shen Yuhong;Technique of Parametric Modeling based on APDL Language[J];Computer Study;2005-03
【Secondary References】
Chinese Journal Full-text Database 5 Hits
1 FENG Shu-long;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences;;Influence of the parameters of a grating ruling tool system on grating line bend[J];Journal of Changchun University of Technology(Natural Science Edition);2013-06
2 LIN Cao,YU Song-song,TAO Gui-bao,CHENG Kai,TAO You-tao,SU Xin-hong(State Key Laboratory of Mechanical Transmission,Chongqing University,Chongqing 400030,China);Static and dynamic optimal design of bridge-type mechanism of micro/nano-positioning platform[J];Journal of Zhejiang University(Engineering Science);2012-06
3 LIN Chao,YU Song-song,CHENG Kai,Cui Xin-hui,TAO You-tao,WANG Jing-chao(The State Key Laboratory of Mechanical Transmission,Chongqing University,Chongqing 400030,China);Dynamic analysis and testing of micro/nano-positioning platform[J];Journal of Zhejiang University(Engineering Science);2012-08
4 LIN Chao,YU Song-song,CHENG Kai,WANG Yong-qin,CUI Xin-hui,TAO You-tao(The State Key Laboratory of Mechanical Transmission,Chongqing University,Chongqing 400030,China);Modal testing and optimal design for a micro/nano-transmission platform[J];Journal of Vibration and Shock;2012-17
5 LIN Chao,TAO You-tao,CHENG Kai,YU Song-song,LIU Lei(State Key Laboratory of Mechanical Transmission,Chongqing University,Chongqing 400030,China);Displacement coupling analysis of micro/nano transmission platform[J];Journal of Zhejiang University(Engineering Science);2013-04
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 JI Guo-jin,MA Kui ,WANG Lei (China-German Colloge of Tongji University,Shanghai200092,China);Survey on micro-nano positioning /driving technologies[J];Semiconductor Information;2003-05
2 Chu Xiangcheng Li Longtu (Dept.of Materials Science & Engineering,Tsinghua University);Recent Progress in Research on Piezo-Ceramic Ultrasonic Motor[J];Materials Review;2001-06
3 CUIYu-guo~(1,2),SUNBao-yuan~(*1),DONGWei-jie~3,YANGZhi-xin~1 ( 1.School of Mech. Eng., Dalian Univ. of Technol., Dalian 116024, China; 2.Inst. of Technol., Ningbo Univ., Ningbo 315211, China; 3.School of Electr. and Inf. Eng., Dalian Univ. of Technol., Dalian 116024, China );Study of coordinate transform model for hysteresis nonlinearity in piezoceramic actuator[J];Journal of Dalian University of Technology;2004-02
4 GONG Feng-fei (Department of Physics, East China Normal University, Shanghai 200062, China);The Principle and Application of Microactuators[J];Electronic Components $ Materials;2003-06
5 Li Shengyi Liang Jiancheng (Department of Precision Machinery and Instrument);Learning Control for Piezoelectric Cutting Tool Location in Ultra—precision Manufacturing[J];Journal of National University of Defense Technology;1992-03
6 Zhang Lamei Huang Qisheng Yu Xiaofen;Design of Micro Displacement Worktable Controlled by Closed Ring[J];Tool Engineering;2004-04
7 SUN Li-ning, SUN Shao-yun, QU Dong-sheng, CAI He-gao (Robot Research Institute of Harbin Institute of Technology, Harbin 150001, China);Micro-drive positioning system based on PZT and its control[J];Optics and Precision Engineering;2004-01
8 YAN Zu-gen,SUN Li-ning,JIE De-gang(Robotic Institute,Harbin Institute of Technology,Harbin 150001,China);Research of micro-driven table based on PZT and its control system[J];Optics and Precision Engineering;2005-06
9 ZHENG Xiao-hu~(1,2),ZHU Di~1 (1.College of Mechanical & Electrical Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing 210016,China;2.Mechanical Department of Huaiyin Institute,Huai'an 223001,China);Application of fuzzy neural network to optimizing UV-LIGA process[J];Optics and Precision Engineering;2006-01
10 SUN Li-ning,MA Li,RONG Wei-bin,GAO Yan (Robot Research Institute,Harbin Institute of Technology,Harbin 150001);Design and analysis on a 2-DOF nanopositioning stage[J];Optics and Precision Engineering;2006-03
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