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《Chinese Journal of Sensors and Actuators》 2009-10
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Study on Sensing Characteristics of Micro Capacitive Sensor Based on MEMS

WANG Qingmin1,YANG Yaoen2,SU Mubiao1,LIU Yuhong11.Structural Health Monitoring and Control Institute,Shijiazhuang Railway Institute,Shijiazhuang 050043,China;2.Shijiazhuang Institute of Railway Engineering,Shijiazhuang 050041,China  
Aiming at the disadvantage of traditional sensor for structural health monitoring for a long time,a new type of micro capacitive sensor based on MEMS is developed.The static and dynamic sensing characteristics are analyzed in theory and in compared experiment.The results show that the linearity is above 0.999%F.S under loading-unloading cycles,the sensitivity is 6.9840με/kN and the repeatability is 1.43%F.S;the dynamic sensing characters is as well as traditional accelerometer.
【Fund】: 铁道部攻关项目资助(2007G028);; 河北省攻关项目资助(08963523D)
【CateGory Index】: TP212
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