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《Journal of Transducer Technology》 2001-10
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Design and system-level simulation of MEMS

MENG Wei min, LI Wei hua, HUANG Qing an (Microelectronics Center,Southeast University,Nanjing 210096,China)  
The focus of MEMS production has changed from the developmentof a single MEMS device to the development of a whole MEMS system.So the system level simulation of MEMS systems becomes more and more important.Structured CAD methodology for integrated MEMS design is introduced,together with the modeling and simulation level of MEMS systems.Emphasis is put on the generation of micro models and the realization of system level simulation.An example for the system level simulation of an accelerometer is finally given.
【Fund】: 教育部科学与技术研究重点资助项目 ( 0 0 0 6 5 )
【CateGory Index】: TP21
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