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《Journal of Transducer Technology》 2003-08
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Design of a micro capacitive acceleration sensor based on MEMS

CHENG Wei, ZENG Xiao-lu, BIAN Jian-tao, FENG Yong-jian(Sah Pen-Tung MEMS Research Center, Xiamen University, Xiamen 361005,China)  
Structure and process of a micro capacitive acceleration sensor based on MEMS technology were given.So did the fabrication process.With the purpose of grasping the sensor's characters of mechanics and electrics,its mechanics model was discussed.On this basis the sensor's modal analysis was made.In order to get the nonlinear relationship between the acceleration and capacitive signal,an effective method based on FEA was proposed.The detail processing steps was designed,which explained the feasibility of the fabrication.The sensor has advantages of simple structure,operation reliability and the wide work range.Using this set of method,sensors with different test ranges can be designed and fabricated.
【CateGory Index】: TP212.1
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