Full-Text Search:
Home|About CNKI|User Service|中文
Add to Favorite Get Latest Update

Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer

XU Hong-qiang, CHEN Hua-ling (Inst of Mech Engin,Xi'an Jiaotong University,Xi'an 710049,China)  
A approximate analysis method has been developed to solve the problem of coupled electrostatic-mechanical analysis for interdigital micro-accelerometer. As an example, the effect of the coupled field on sensitivity of a new micro-accelerometer is analyzed, the result is compatible with the reality,and the accuracy is approaching to finit element method(FEM).Further research shows if the approximate analysis method and FEM are integrated, the result can be taken with less calculation and more precision.
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
©CNKI All Rights Reserved