Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer
XU Hong-qiang, CHEN Hua-ling (Inst of Mech Engin,Xi'an Jiaotong University,Xi'an 710049,China)
A approximate analysis method has been developed to solve the problem of coupled electrostatic-mechanical analysis for interdigital micro-accelerometer. As an example, the effect of the coupled field on sensitivity of a new micro-accelerometer is analyzed, the result is compatible with the reality,and the accuracy is approaching to finit element method(FEM).Further research shows if the approximate analysis method and FEM are integrated, the result can be taken with less calculation and more precision.
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