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《Journal of Transducer Technology》 2004-07
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Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer

XU Hong-qiang, CHEN Hua-ling (Inst of Mech Engin,Xi'an Jiaotong University,Xi'an 710049,China)  
A approximate analysis method has been developed to solve the problem of coupled electrostatic-mechanical analysis for interdigital micro-accelerometer. As an example, the effect of the coupled field on sensitivity of a new micro-accelerometer is analyzed, the result is compatible with the reality,and the accuracy is approaching to finit element method(FEM).Further research shows if the approximate analysis method and FEM are integrated, the result can be taken with less calculation and more precision.
【CateGory Index】: TH824.4
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【References】
Chinese Journal Full-text Database 1 Hits
1 DU Min1,LIN Wei1,LU Peng1,LI Jianli2(1.Institute of Disaster-prevention Science and Technology,Sanhe 065201,China;2.Beijing University ofAeronautics and Astronautics,Beijing 100083,China);Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement[J];地震工程与工程振动;2007-06
【Citations】
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【Co-citations】
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1 ZHU Yi, GUO Dan (State Key Laboratory of Tribology,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);COUPLED SIMULATIVE ANALYSIS FOR DRIVE CHARACTERISTIC OF MICRO-COMB STRUCTURES[J];工程力学;2008-07
2 ZHAO Yu,GAO Guo-wei,WANG Chao,ZHANG Jun,PAN Xue(Department of Electronic Information Engineering,Beijing Information Technology Institute,Beijing,100101,China);Design of automatic zero adjustment of CANbus inclinometer[J];北京机械工业学院学报;2007-04
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【Co-references】
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1 LI Caihua,KONG Qingyan (Institute of Engineering Mechanics, China Seismological Bureau, Harbin 150080, China) (Harbin University of Commerce, Harbin 150028, China);Dam-reservoir Earthquake Monitoring System Part Two Variable-distance Capacitance Accelerometer[J];水电自动化与大坝监测;2006-03
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【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 DU Min1,2,LI Qiao-yan1,XU Guo-dong1(1.Institute of Disaster-prevention Science and Technology,Sanhe 065201,China; 2.Beijing University of Technology,Beijing 100124,China);Design and error calibration of a micro-electro-mechanical digital geophone system[J];振动与冲击;2013-09
【Secondary Citations】
Chinese Journal Full-text Database 1 Hits
1 YUAN Guang, DING Henggao, GAO Zhongyu DONG Jingxin Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;Design a multi finger silicon micromechanical accelerometer[J];清华大学学报(自然科学版);1998-11
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