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《Transducer and Microsystem Technologies》 2006-06
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Design of the high precision laser alignment system with PSD

JIAO Guo-hua ~(1,2),LI Yu-lin~1,HU Bao-wen~1(1.Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi'an 710068,China;2.Graduate School,the Chinese Academy of Sciences,Beijing 100039,China)  
Aim at the traditional manual way of the shaft alignment,a high precise laser alignment system with position sensing detector(PSD) is describes.In the PSD signal process,a new method to calculate the value of the position is adopted by using single chip computer with A/D change and the software arithmetic insteud of substitute the pure circuit method.The accuracy and the stability of system are improved.The range of offset measurement is (±4 mm);the resolution is 1.5 μm,the accuracy is 5.5 μm.It can be used for shaft aligment and position.
【Fund】: 国家自然科学基金资助项目(60337030)
【CateGory Index】: TH741.4
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