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《Transducer and Microsystem Technologies》 2006-08
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Detection circuit design of MEMS capacitive accelerometer

SHI Yun-bo,WANG Ling,LIU Jun (State Key Laboratory of Electronic Measurement Technology,Department of Electronic Science and Technology,North University of China,Taiyuan 030051,China)  
In order to detect the MEMS capacitive accelerometer signal,through compared of the advantage and the disadvantage of the difference capacity detection circuit,combined the direct current charge and discharge and alternating current measurement ways,a differential detection circuit is designed.The carrier wave is rectangular wave,the circuit mainly is composed of rectangular wave occurrence circuit,differential circuit,the whole wave commutate circuit and filter circult.Experiment results show the resolution is 10~(-16) F,the nonlinearity is less than ±1 %FS,the system can be used to detect the capacity accelerometer.
【Fund】: 武器装备预先研究计划资助项目(514090304B0401);; 山西省自然科学基金资助项目(20051040)
【CateGory Index】: TH824.4
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