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《Transducer and Microsystem Technologies》 2006-08
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Calibration of position detecting error for improved 2-dimensional position sensitive detector

QIU Zi-xue~1,YUAN Jiang~1,MAO Jian~2 (1.School of Mechanical Engineering,Nantong University,Nantong 226007,China;2.Nantong Hicon Electronics Co.,Ltd,Nantong 226361,China)  
The principle and a signal conditioning circuit of tetra-lateral 2-dimensional position sensitive detector(PSD) are analyzed.The experimental calibration system is built in a multipurpose instrument microscope for reducing the position detecting error of this sensor.Based on the error theory,the measuring datum in direction X and Y of the PSD are calibrated in separately area A and B.Experimental results show that the position detection error of the PSD can be reduced by using this method,and the position detection error in area A is no more than(±0.02 mm).
【Fund】: 南通市工业科技创新计划资助项目(A5033)
【CateGory Index】: TH742
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