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《Transducer and Microsystem Technologies》 2007-07
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Study of off-chip tensile test experimental facility for micro-component mechanical property

SHEN Hong-yuan,CHU Jin-kui,ZHANG Duan-qin,LUO Ru-lin(Key Laboratory for Micro /Nano Technology and System of Liaoning Province,Key Laboratory for Precision & Non-traditional Machining,Ministry of Education,Dalian University of Techonology,Dalian 116023,China)  
The main function of tensile test in mechanical property testing of micro-sized structure is measurement question of elastic ratio,Poisson's ratio,yield strength anad fracture strength.A design procedure and principle of a off-chip tensile test experimental facility are presented.The specimen is placed on the dynamic and static platform,piezoelectric actuator drives dynamic platform to pull specimen till specimen is snapped.The force loaded on the specimen and the elongation of it are measured by the displacement sensor and the force sensor respectively.Every part of the facility separately is presented,the analysis of error is given.The result shows the design of the facility is logical,achieves prospective aim.
【Fund】: 国家自然科学基金资助项目(50535030)
【CateGory Index】: TH87
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