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《Transducer and Microsystem Technologies》 2008-05
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Study on electrical test method of mode frequency for capacitive MEMS devices

HOU Zhan-qiang,XIAO Ding-bang,JIANG Ping,WU Xue-zhong(School of Mechanical Engineering and Automation,National University of Defense Technology,Changsha 410073,China)  
A mode frequency test method for the MEMS capacitive devices is put forward based on modulation and demodulation.The test theory and the constitution of the test system are introduced.The simulated mode frequency of a comb microaccelerometer by Ansys is 3941Hz,and the measured mode frequency of this microaccelerometer by the test system is 3440Hz,which is very close to the simulated result.So it can be concluded that the mode frequency test system works very well,and the difference between the simulated result and the measured result is mainly due to the fabrication imperfection.
【Fund】: 国家自然科学基金资助项目(50375154)
【CateGory Index】: TP212
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【Citations】
Chinese Journal Full-text Database 1 Hits
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【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 HUANG Hua, JIAO An chao (School of Vehicle & Transportation Engineering,Beijing Institute of Technology,Beijing 100081,China);Application of No-Contact Measuring by Laser in Modal Analysis of the oil-box of the Vehical[J];Acta Armamentarll The Volume of Tank, Armored Vehicle and Engine;2002-02
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3 Yang Jiahua; Chen Weifu; Huang Xudong (School of Mechanical Engineering and Applied Electronic Techmology, Beijing Polytechnic University, Beijing, 100022) Guan Hua (University of Science and Technology, Beijing, 100083 );Research on Identification of the Structural Interface Parameter of Machine Tool Bed with Column[J];JOURNAL OF BEIJING POLYTECHNIC UNIVERSITY;1999-01
4 YIN Chun-hua,LU Guo-hua,ZHAO Lai-ding(College of Communications and Information Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210003,P.R.China);Ship-borne mobile-servo system based on BLDCM controller[J];Journal of Chongqing University of Posts and Telecommunications(Natural Science Edition);2009-01
5 LI Jie, ZHANG Wen-dong, LIU Jun National Key Laboratory for Electronic Measurement Technology, Department of Electronic Science and Technology, North University of China, Taiyuan 030051,china;Research on the Application of the Time-Serial Analysis Based Kalman Filter in MEMS Gyroscope Random Drift Compensation[J];Chinese Journal of Sensors and Actuators;2006-05
6 YANG Jin-xian~ 1,2 ,YUAN Gan-nan~ 1* ,XU Liang-chen~ 1,2 (1.College of Automation,Harbin Engineering University,Harbin 150001 China;2.Harbin Jian-Cheng Group,Harbin 150030,China);The Research of Testing and Calibration Technology Based on Micro-Mechanical Gyro[J];Chinese Journal of Sensors and Actuators;2006-05
7 XU Yu, LI Ping, HAN Bo(Institute of Industrial Process Control, Zhejiang University, Hangzhou 310027, China);Low Cost Attitude Determination System for Accelerated Rigid Bodies[J];Chinese Journal of Sensors and Actuators;2007-10
8 LI Jin-ming1,2,GUO Hui-fang1,LIU Jun1 (1.Key Laboratory of Instrument Science & Dynamic Measurement (North University of China),Ministry of Education, Taiyuan 030051, China; 2.Department of Precision Instruments and Mechanology, TsingHua University, Beijing 100084, China);Design and Simulation of a Three-frame Capacitive Micromechanical Gyroscope[J];Chinese Journal of Sensors and Actuators;2008-02
9 MA Cong-bing (Department of Traffic Technology , Huaiyin Institute, Huaiyin Jiangsu 220031, China);Research of Forward Linear Prediction on Processing of Silicon Microgyroscope Signal[J];Chinese Journal of Sensors and Actuators;2008-02
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【Secondary Citations】
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1 ;A High Linear Interface Circuit for Micro Machined Differential-capacitance Type Accelerometer[J];MEASUREMENT & CONTROL TECHNOLOGY;1999-10
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