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《Transducer and Microsystem Technologies》 2008-05
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Study on electrical test method of mode frequency for capacitive MEMS devices

HOU Zhan-qiang,XIAO Ding-bang,JIANG Ping,WU Xue-zhong(School of Mechanical Engineering and Automation,National University of Defense Technology,Changsha 410073,China)  
A mode frequency test method for the MEMS capacitive devices is put forward based on modulation and demodulation.The test theory and the constitution of the test system are introduced.The simulated mode frequency of a comb microaccelerometer by Ansys is 3941Hz,and the measured mode frequency of this microaccelerometer by the test system is 3440Hz,which is very close to the simulated result.So it can be concluded that the mode frequency test system works very well,and the difference between the simulated result and the measured result is mainly due to the fabrication imperfection.
【Fund】: 国家自然科学基金资助项目(50375154)
【CateGory Index】: TP212
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