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《Transducer and Microsystem Technologies》 2008-09
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Analysis of dynamic characteristics of torsion micromirrors with edge effects

LU Jing,XIANG Yu,YUAN Li-yun,MA Xiao-qiang(Department of Automobile Engineering,Guangxi University of Technology,Liuzhou 545006,China)  
Based on the electrostatic force computation formulas of rectangle capacitor with edge effects,a dynamic characteristic model of a torsion micromirror is illustrated.The load is calculated by Romberg numerical integration procedure and an iterative refinement homogeneous capacity high precision integration method(IRHCHPIM)is put forward to solve the nonlinear different equation.Numerical calculated results show that parameters,such as voltage,geometry dimensions of the micromirror and electrodes etc,can affect the edge effect,which leads a larger error in dynamic analogy.Therefore the edge effects should be considered at analyzing the mechanical characteristics of micromirror.
【Fund】: 国家自然科学基金资助项目(10662003);; 广西自然科学基金资助项目(0481028)
【CateGory Index】: TN15
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