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《Transducer and Microsystem Technologies》 2008-09
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Analysis and simulation of quadrature error on MEMS gyroscope

WEN Bai-qian,LIU Jian-ye,LI Rong-bing(Navigation Research Center,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)  
Aimed at quadrature error induced with mechanical coupling,the dynamic equations of MEMS gyroscopes including error are given,under the condition of open loop detection and closed loop detection quadrature error is analyzed separately.Effect of quadrature error on MEMS gyroscope performance is inhibited and the input angular rate signal is extracted by using the method of correlation detection.Simulink is used on the modeling and simulation of gyroscope,the simulation results show that the effect of quadrature error can be eliminated effectively under the condition of open loop detection and closed loop detection.Hence,the validity of the theoretical analysis is verified.
【Fund】: 国防科技预研基金资助项目(9140A090207)
【CateGory Index】: V241.5
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