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《Transducer and Microsystem Technologies》 2009-03
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Design of detecting circuit for differential capacitive small displacement sensor

ZHANG Ling,BAO Bing-hao,GONG Yong-zhen,ZHAO Hong-li(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China)  
A signal detection circuit of capacitance sensor for small displacement is given.The circuit is composed of phase-sensitive circuit,phase shift circuit and low-pass filter.The small displacement less than 0.15 mm can be measured and the displacement direction can be detected exactly.The circuit is simple,convenient and low cost.The circuit is used to process the signal output from the conversion bridge of the differential capacitance small displacement sensor.Experimental results show that the detection circuit has good stability and anti-jamming.The linearity is 0.492 %.The sensitivity is 0.629 1 V/mm.
【CateGory Index】: TP212
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