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《Transducer and Microsystem Technologies》 2009-05
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Angle-vibration detection technique based on micro-change capacitive sensor

HE Yuan-ming,GE Zhao-yan,ZI Dao-zhou (College of Electrical and Information Engineering,Hunan University,Changsha 410082,China)  
A technique to detect angle and vibration is designed,which can be successfully applied in the capacitive MEMS devices.The technique is based on the DC charge and discharge theory of RC series circuit,and the vibration and angle offset can be detected by MCU system.After the original signal is processed by the appropriate filter,the noise disturbance can be reduced efficiently,and the fundamental component and the high harmonic component will be separated quickly and accurately,then the curve of the vibration and angle offset can be obtained.Experiment results show that angle detection and vibration detection can be carried out and non-interfering at the same time.
【CateGory Index】: TP274
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【Citations】
Chinese Journal Full-text Database 3 Hits
1 SHI Yun-bo,WANG Ling,LIU Jun (State Key Laboratory of Electronic Measurement Technology,Department of Electronic Science and Technology,North University of China,Taiyuan 030051,China);Detection circuit design of MEMS capacitive accelerometer[J];Transducer and Microsystem Technologies;2006-08
2 Li Guona Wang Baoliang Huang Zhiyao Li Haiqing(Department of Control Science & Engineering, Zhejiang University, Hangzhou 310027, China);The Comparison of the Capacitance Measurement Methods in Electrical Capacitance Tomography[J];Chinese Journal of Scientific Instrument;2005-S2
3 LIU Wan-guo1, YANG Gong-liu1, XIAO Qian2 (1. Tianjin Navigation Instrument Research Institute, Tianjin 300131, China; 2. School of Automation, Harbin Engineering University, Harbin 150001, China);Application of Small Capacitance Measuring Techniques in Gravimeter[J];Journal of Chinese Inertial Technology;2005-01
【Co-citations】
Chinese Journal Full-text Database 4 Hits
1 SUN Nan,HUANG Min,QI Zhi-sheng(Department of Mechanical Engineering,Beijing Institute of Machinery,Beijing 100085,China);Application of the capacitance circuit for electrical capacitance tomography system[J];Journal of Beijing Institute of Machinery;2006-02
2 WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China);Design of Differential Capacitance Detection Circuit[J];Chinese Journal of Sensors and Actuators;2006-06
3 by Zhao Liye;Research on Detection Loop Principle Error of the Precise Gravitational Sensor[J];Ship Electronic Engineering;2007-04
4 XIAO Qian(Harbin Engineering University, Harbin 150001, China);Wavelet analysis apply to various navigation sensor[J];;2005-03
【Secondary Citations】
Chinese Journal Full-text Database 2 Hits
1 XIA Jing bo 1\ LI Zhi an 1\ SONG Rui ling 2 (1.School of Telecommunication Engineering, Airforce University of Engineering, Xi'an, 710077; 2.Xi'an Aevo Technical College, Xi'an, 710077);COMPARISON OF CAPACITANCE MEASUREMENT FOR CAPACITANCE TOMOGRAPHY[J];ROBOT;2000-03
2 PENG Bo, HE Xiaoping, SU Wei (Electronic Engineering Research Institute of China Academy of Engineering Physics, Mianyang, Sichuan 621900, China);A Micro-machined Electrostatic Servo Accelerometer[J];JOURNAL OF CHINESE INERTIAL TECHNOLOGY;2000-01
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