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《Transducer and Microsystem Technologies》 2009-05
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Angle-vibration detection technique based on micro-change capacitive sensor

HE Yuan-ming,GE Zhao-yan,ZI Dao-zhou (College of Electrical and Information Engineering,Hunan University,Changsha 410082,China)  
A technique to detect angle and vibration is designed,which can be successfully applied in the capacitive MEMS devices.The technique is based on the DC charge and discharge theory of RC series circuit,and the vibration and angle offset can be detected by MCU system.After the original signal is processed by the appropriate filter,the noise disturbance can be reduced efficiently,and the fundamental component and the high harmonic component will be separated quickly and accurately,then the curve of the vibration and angle offset can be obtained.Experiment results show that angle detection and vibration detection can be carried out and non-interfering at the same time.
【CateGory Index】: TP274
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