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《Transducer and Microsystem Technologies》 2010-03
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Non-contact dynamic silicon wafer tester based on virtual instrument

YAN You-jun1,LI Yun-fei2(1.Electron and Communication Engineering Department,Suzhou Vocational College,Suzhou 215104,China;2.School of Computer science &Technology,Suzhou University,Suzhou 215002,China)  
Principle,composition,functions and features of non-contact dynamic silicon wafer tester are presented.A dynamic non-contact silicon chip test rig is developed based on virtual instrument,which incorporates shift testing of capacitance distance sensor technology,body resistance-testing technology of eddy-current sensor and semiconductor P/N polarity testing technology of infrared optical pulse sensor.The instrument not only simulates the testing instruments such as signal generator,digital oscillograph,programmable power supply and digital multimeter,but also has the function of data management,moving control,and location test,etc.It is required by large-scale production of photovoltaic industry.
【CateGory Index】: TP216;TN304.07
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