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《Transducer and Microsystem Technologies》 2011-02
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Research of high precision fast focus method for optical auto-detector

CHENG Liang-lun,PAN Jian-hua(School of Automation,Guangdong University of Technology,Guangzhou 510006,China)  
To improve the auto-focus(AF)accuracy,speed and stability of optical auto-analyzer,a novel fast high precision AF technology is proposed.Laser beam is condensed to the working table and then the image of laser pattern is formed at the CCD based on laser trigonometry.So the change of gray spot can be used to realize focusing.Experimental results show that repetition focusing precision can reach 0.1μm,focusing time is less than 200ms,and can meet practical application requirements for the industrial optical inspection systems.
【Fund】: 广东省教育厅产学研联合项目(2007A090302071 2009B090300242)
【CateGory Index】: TP216
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【Citations】
Chinese Journal Full-text Database 4 Hits
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【Co-citations】
Chinese Journal Full-text Database 9 Hits
1 Zhao Zhibin1,2 Liu Jinghong11Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin 130033,China2Graduate University of Chinese Academy of Sciences,Beijing 100049,China;Power Spectra-Based Auto-Focusing Method for Airborne Optoelectronic Platform[J];Acta Optica Sinica;2010-12
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