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Research of high precision fast focus method for optical auto-detector

CHENG Liang-lun,PAN Jian-hua(School of Automation,Guangdong University of Technology,Guangzhou 510006,China)  
To improve the auto-focus(AF)accuracy,speed and stability of optical auto-analyzer,a novel fast high precision AF technology is proposed.Laser beam is condensed to the working table and then the image of laser pattern is formed at the CCD based on laser trigonometry.So the change of gray spot can be used to realize focusing.Experimental results show that repetition focusing precision can reach 0.1μm,focusing time is less than 200ms,and can meet practical application requirements for the industrial optical inspection systems.
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