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《Transducer and Microsystem Technologies》 2011-10
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Research and fabrication of multi-parameter microsensor array for water quality monitoring based on integrated reference electrode

ZHANG Huan-huan1,2,LIU Bin1,2,JIN Qing-hui2,LIU Yong-song1(1.School of Sciences,Zhejiang Sci-Tech University,Hangzhou 310018,China; 2.State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)  
An integrated microelectrode type sensor consisting of Ag/AgCl reference electrode for simultaneous measurement of temperature,conductivity and oxidation reduction potential(ORP)is fabricated using micro-electro-mechanical systems(MEMS)technology and electrochemical modification method.The resistance and the temperature has a good linear relationship.The constant of the conductivity electrode is 2.723,so this sensor can measure the general water conductivity.Compared with the slope of the commercial ORP instrument,the slope of the integrated ORP sensor(0.997 33)is close to the theoretical slope(1.000 0)against quinhydrone calibration solutions.
【Fund】: 上海市科委科研计划资助项目(09JC1416500 10391901600 1052nm06100);; 浙江理工大学科研启动基金资助项目(0813827—Y);; 浙江省教育厅科研计划资助项目(Y200909713)
【CateGory Index】: TP212.2
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Chinese Journal Full-text Database 3 Hits
1 Bian Heming1,2,Xia Shanhong1(1.State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100190,China;2.Graduate University of Chinese Academy of Sciences,Beijing 100049,China);Microsensor and Microsystem Applied to Water Quality Detection[J];Micronanoelectronic Technology;2009-06
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