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《JOURNAL OF TRANSDUCER TECHNOLOGY》 1996-01
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Electrostatic Drive Technology of Silicon Micromechanical Vibrating Gyroscope

Mao Pansong;Wang Xiulun(Southeast University)  
The electrostatic drive technology of silicon micromechanical vibratingg gyroscope with inner and outer frames is studied. The anayse illustrated that the range and frequency of drive voltage in outer frame are bound the resonant frequencies of its inner and outer frames in order to get opeimum gyroscope transducer sensitivity.
【CateGory Index】: TP212
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【References】
Chinese Journal Full-text Database 2 Hits
1 GAO Yan,SHI Wen-kang,JI Xiao-jun(Shanghai Jiaotong University,Shanghai 200240,China);Design of Driving Circuit for Microsensor and Its Optimization[J];Chinese Journal of Sensors and Actuators;2007-04
2 Mao Pansong; Zhou Bailing;Wu Shaofu ;Wan Dejun (Southeast University);Exploring on Si Micromechanical Vibrating Gyroscope[J];JOURNAL OF TRANSDUCER TECHNOLOGY;1996-05
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 YUAN Ming-quan (Center of Advanced Sensor & Actuator, Electronic Engin. Inst., Sichuan 621900, China);Micro-machining based on silicon[J];Semiconductor Technology;2001-08
2 SONG Zhao hui , JIA Meng jun , LI Xin xin (State Key Laboratory of Transducer Technology, Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China);Design of micromachined gyroscope with electromagnetic actuation and capacitive detection[J];Micronanoelectronic Technology;2003-Z1
3 KONG Xiang dong,ZHANG Yu lin,SONG Hui ying(Institute of Electron beam,Shandong University,Jinan 250061,China);Development and application of LIGA technology[J];Micronanoelectronic Technology;2004-05
4 XU Xiao-gang, ZHENG Chuan, GAO Wen-xiu (Xiamen University a.Department of Mechanical & Electronic Engineering;b.Department of Physics; c.Nano Engineering & Technology Center, Xiamen 361005, China);A Novel Fabricating Process of the Tunable Grating[J];Micronanoelectronic Technology;2005-03
5 WANG Pei-sen1,YU Ying1,LUO Zhong-zi2,PENG Hui-yao1(1.Department of physics and information engineering,Fuzhou University,Fuzhou 350002,China;2.Peng Tung Sah MEMS research center,Xiamen University,Xiamen 361005,China);Application of Si/Glass Bonding in the Facture of RF-MEMS Switches[J];Micronanoelectronic Technology;2007-01
6 Li Lijie (The 13th Institute,Ministry of EI,Shijiazhuang 050051);Fabrication of Tunneling Micro SiliconTip[J];SEMICONDUCTOR INFORMATION;1999-03
7 Cao Xinping,Zhang Dacheng,Huang Ru,Zhang Xing and Wang Yangyuan(Institute of Microelectronics,Peking University,Beijing 100871,China);A New Stray-Immune Interface Circuit for Capacitive Sensors[J];Chinese Journal of Semiconductors;2002-07
8 Chen Yong 1,Jiao Jiwei 1,Wang Huiquan 2,Jin Zhonghe 2,Zhang Ying 1,Xiong Bin 1,Li Xinxin 1,and Wang Yuelin 1(1 State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)(2 Department of Information and Electronics,Zhejiang University,Hangzhou 310027,China);Design and Noise Analysis of A Micromachined Gyroscope Working at Atmospheric Pressure[J];Chinese Journal of Semiconductors;2005-01
9 WANG Ying 1, SUN Yu nan 1, QIN Bing kun 1, YIN Ping 2 ( 1. Dept. of Optical Engineering, Beijing Institute of Technology, Beijing100081, China; 2. Dept. of Professional Basic Course, Beijing United University, Beijing 100101, China);A Study on the Driving and Detecting-Electrodes in a Micro Quartz Tuning Fork Gyroscope[J];Journal of Beijing Institute of Technology;2001-04
10 WANG Ying, SUN Yu nan, QIN Bing kun (Department of Optical Engineering, Beijing Institute of Technology, Beijing100081, China);Finite Element Simulation of the Vibratory Characteristics for Quartz Tuning Fork Gyroscope[J];北京理工大学学报(英文版);2002-02
【Secondary References】
Chinese Journal Full-text Database 4 Hits
1 Chen Deying (Microelectronics Center,Southeast University,Nanjing 210096);Study of The Etch Stop Technology in Heavily Boron Doped Silicon[J];SEMICONDUCTOR TECHNOLOGY;1998-05
2 WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China);Design of Differential Capacitance Detection Circuit[J];Chinese Journal of Sensors and Actuators;2006-06
3 MA Zong-min1,SHI Yun-bo1,LIU Jun1,2 1.National Key Lab for Electronic Measurement and Technology,North University of China, Key Laboratory of Instrumentation Science & Dynamic Measurement(North University of China),Ministry of Education,Taiyuan 030051,China;2.Department of Mechanical Engineering university of California,Berkeley.Berkeley,CA,94720,USA;The Design of the Single-Axis Integrated Inertia Measurement Device[J];Chinese Journal of Sensors and Actuators;2008-04
4 Yin Yong Wang Shourong Wang Cunchao Sheng Ping(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China);Structural scheme design and simulation of structure-decoupled dual-mass MEMS gyroscope[J];Journal of Southeast University(Natural Science Edition);2008-05
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