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Electrostatic Drive Technology of Silicon Micromechanical Vibrating Gyroscope

Mao Pansong;Wang Xiulun(Southeast University)  
The electrostatic drive technology of silicon micromechanical vibratingg gyroscope with inner and outer frames is studied. The anayse illustrated that the range and frequency of drive voltage in outer frame are bound the resonant frequencies of its inner and outer frames in order to get opeimum gyroscope transducer sensitivity.
【CateGory Index】: TP212
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