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Relationship Between Sensitivity of Silicon MicromechanicalTuning-Fork Gyroscopy and Its Natural Frequencies

Ruan Aiwu(Automatic Control Department, Northwestern Polytechnical University, Xi'an 710072)Li WanyuFeng Peide(Electronics & Information School, Xi'an Jiaotong University) (618 Research Institute of Aeronautics Industry Co.)  
Micromechanical gyro performance is dependent on its sensitivity. How to tune the sense mode resonance frequency to improve the sensitivity are discussed.
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