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《Sensor World》 2004-01
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Modeling the Stress Calculation of the Diffusion Silicon Pressure Sensor

The stress calculation model of the diffusion silicon pressure sensor is established by the thick-plate method of the elastic-mechanics. The output voltage is related to the resistance change in the electrical bridge. The results of calculation and the calibrated values are almost the same.
【CateGory Index】: TP212.1
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