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《Sensor World》 2019-11
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Water Vapor Control of Hermetic Packaging Process for Small Size Devices

YAN Yu-ning;SHEN Juan;WANG Jun;CHEN Jie;Nanjing Zhongxu Electronic Technology Co.,Ltd.;  
With the improvement of requirements of products for reliability and detection technologies, the water vapor control of small size devices is also required clearly. The reasons of high water vapor are analyzed, the technical points of water vapor control for small size devices are put forward, and the gold-tin-alloy packaging process is designed. With the pre-formed gold-tin-alloy welded rings selected as the packaging materials, a better packaging process control method is explored by means of a lot of experiments, which can effectively solve the problem of water vapor control of small size devices and ensure the electrical performance and reliability of the products.
【CateGory Index】: TN05
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