In Situ Research of the Early Stages of Corrosion in TiN Thin Films Using the Electrochemical Atomic Force Microscopy
YU Chun -fu, XU Jiu -jun, WANG Liang et al (Institute of Material & Technology, Dalian Maritime University, Dalian, P. R. China 116026).
TiN films were deposited onto 1 Cr1 8Ni9 austenitic stainless steel using ion beam enhanced deposition (IBED) technique. In situ electrochemical atomic force microscopy (ECAFM) has been used to study the early stages of corrosion of the TiN films in 3% NaCl solution at the nanometer scale. It was shown that titanium oxide was reduced and dissolved under cathodic polarization potential and the micro - corrosion was niildly occurred under low anodic polarization potential. Electropolishing was occurred when the anodic polarization potential rising from 200 to 300 mY. The results indicated that the atomic force microscopy was a powerful instrument to investigate the early stases of corrosion; the process of micro-corrosion could be in situ studied.
【CateGory Index】： TG174.3