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《Materials Review》 1997-04
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Semiconducting Mechanism, Aplications and Fabrication of ITO Films

The semiconducting mechanism, applications and fabrication techniques of ITO films are reviewed. The semiconducting mechanism of ITO is attributed to doping with Sn4+ and to oxygan vacancies. The semiconducting transparent ITO films are mainly used in optical-electrical devices such as LCD (liquid crystal display) device. Various fabrication techniques cur-rently in use, including magnetron sputtering, CVD, sol-gel, spray-pyrolysis, are discussed.
【CateGory Index】: TB43
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1 ZHAO Fang-hong,WU Yun-long,CHENG Hui-feng,TAN Huan (China Building Materials Academy,Beijing 100024,China);The Influence of the Thickness of Ag Film to ITO-Ag-ITO-Glass[A];[C];2010
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