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《Materials Review》 1997-04
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Semiconducting Mechanism, Aplications and Fabrication of ITO Films

The semiconducting mechanism, applications and fabrication techniques of ITO films are reviewed. The semiconducting mechanism of ITO is attributed to doping with Sn4+ and to oxygan vacancies. The semiconducting transparent ITO films are mainly used in optical-electrical devices such as LCD (liquid crystal display) device. Various fabrication techniques cur-rently in use, including magnetron sputtering, CVD, sol-gel, spray-pyrolysis, are discussed.
【CateGory Index】: TB43
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Chinese Journal Full-text Database 10 Hits
1 Gao Dewen Wu Guangming Tong Shuai(Beijing Institute of Petro-chemical Technology,Beijing 102617,China);Preparation of ITO Thin Films by Using Spin-coating Method[J];Journal of Beijing Institute of Petro-Chemical Technology;2011-03
2 ZHOU Hong-ming~1,YI Dan-qing~1,YANG Xiao-ling~2(1.School of Materials Science and Engineering,Central South University,Changsha 410083,China;2.Department of Chemical and Biological Engineering,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,China);Technology Survey and Development Tendency Investigation on ITO Films[J];Surface Technology;2006-01
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4 DENG Zanhong,DONG Weiwei,TAO Ruhua,SU Qinglei,FANG Xiaodong(Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031);Development of p-Type Delafossite Structure Oxides[J];Materials Review;2006-03
5 LI Zhi-hua,REN Dong-yan(School of Material Science and Engineering,Central South University,Changsha 410083,China,);Research on the sol-gel technique to fabricate ITO conductive and transparent film[J];Materials Science and Technology;2006-02
6 ZHANG Xue-ao,WU Wen-jian,MAN Ya-hui,LIU Chang-li(College of Aerospace and Material Engineering,National University of Defence Technology,Changsha 410073,China);Progress in preparation of ITO thin films by Sol-Gel process[J];Materials Science and Technology;2007-02
7 JIANG Zi-ran (School of Materials Science and Engineering,Central South University,Changsha 410083,China);Fabrication Techniques and Development of ITO Transparent and Conductive Thin Films[J];Development and Application of Materials;2010-04
8 YUAN Hongmei,LIN Zulun,CHEN Wenbin,WEI Xinying(School of Optoelectronic Information,University of Electronic Science Technology of China,Chengdu 610054,China);Electrical and Optical Properties of ITO Films Prepared by the Sol-Gel Method[J];Chinese Journal of Electron Devices;2010-01
9 ZHI Li, ZHOU Huai-ying(Dept.of Information Material Science and Engineering, Guilin 541004,China);The Fabrication and Applications of ITO Films[J];Journal of Guilin University of Electronic Technology;2004-06
10 Wang Chengyu; Wang Bo; Tao Ying; Liu Hongzhu (Institute of Glass and Inorganic New Materials, Dalian Institute of Light Industry)Ma Tengcai (The Key Laboratory of Material Modification by Ion, Electron and Laser Beams, Dalian University of Technolog;Preparation of Indium Oxide Film on Glass Surface Using Sputtering Deposition Synchro-enchanced by Microwave ECR Plasma Source lon-implantation[J];BULLETIN OF THECHINESE CERAMIC SOCIETY;2000-02
China Proceedings of conference Full-text Database 1 Hits
1 Chenji shou,Xu ai zhong,Liu dan (1.China Building Materials Acadamy,Beijing 100024;2.Wuhan Chutian Industry Laser Equipment Co.LTD,Wuhan,430074);Process Research of Laser Etching with ITO Film[A];[C];2010
Chinese Journal Full-text Database 10 Hits
1 HUANG Xiao-hua1,WANG Xiu-ran2 (1.Dept.of Text.&Garm.,Anhui Insti tute of Mechanical and Electrical Engineering;Wuhu 241000,China;2.Res.Ins.of Qrg.Chem.,Anhui Norm al University,Wuhu 241000,China);Synthesis and characterization of o rganoindium complexex involving ethyl andβ-diketonate ligands[J];Journal of Anhui Institute of Mechanical and Electrical Engineering;2001-04
2 XU Zheng,ZHAO Hui,YANG Sheng-yi,XU Xiu-lai (Institute of Optoelectronic Technology, Northern Jiaotong University, Beijing 100044,China)$$$$;Progress in the study on field emission display technology[J];SEMICONDUCTOR OPTOELECTRONICS;1999-03
3 MA Jin,ZHAO Jun qing,YE Li na,TIAN Mao hua,MA Hong lei (Institute of Optoelectronic Materials and Devices,Shandong University,Jinan 250100,China);Preparation and Characteristics of ITO Films Deposited on Polyester at Low Substrate Temperature[J];SEMICONDUCTOR OPTOELECTRONICS;2000-01
4 YANG Cheng hui (Chongqing Optoelectronics Research Institute,Chongqing 400060,China);Design and Fabrication of Silicon Micro-bench with V-groove for Coupling[J];SEMICONDUCTOR OPTOELECTRONICS;2000-S1
5 LI Hua gao 1, YANG Zi wen 1, LIU Suang 1,2 (1. Chongqing Optoelectronics Research Institute, Chongqing 400060, China; 2. University of Electronic Science and Technology of China, Chengdu 610054, China)$$$$;Preparation of VO_x Films for Uncooled Infrared Detectors[J];Semiconductor Optoelectronics;2001-01
6 LIU Chen, XU Chong yang, ZHONG Zhi you, YIN Sheng, WANG Chang an (Dept. of Electronic Science and Technol., Huazhong University of Science and Technol., Wuhan 430074, CHN);Influence of ITO Surface Treatment on OLED Performance[J];Semiconductor Optoelectronics;2002-03
7 XIE Xiao-qiang, DAI Xu-han, ZHAO Xiao-lin, DING Gui-fu, CAI Bing-chu (Research Institute of Micro/Nanometer Science and Technology,Key Lab.for Thin Film and Microfabrication Technology of Ministry of Education,Shanghai Jiaotong University,Shanghai 200030,CHN);Variable Optical Attenuator Based on MEMS Technology[J];Semiconductor Optoelectronics;2005-03
8 WANG Jun,LIN Hui,YANG Gang,JIANG Ya-dong,ZHANG You-run(School of Optoelectronic Information,University of Electronic Science and Technology of China,Chengdu 610054,CHN);Analysis of Orthogonal Experiments on ITO Films Prepared by DC Magnetron Sputtering[J];Semiconductor Optoelectronics;2007-01
9 ZHU Jian1,2(1.Dept. of Instrument Science and Engineering , Southeast University2.No. 55 Institute of China Electronics Technology Group Corporation, Nanjing 210016,China);Development and applications of MEMS technology[J];Semiconductor Technology;2003-01
10 WANG Si-yu,KANG Jian (Shenzhen SI Semiconductor Co.,Ltd.,Shenzhen518029,China);Application and development of etch equipment and process in semi conductor superfine line manufacturing[J];Semiconductor Information;2002-11
China Proceedings of conference Full-text Database 1 Hits
1 LI Feng-min, ZHAO Jie, WANG Lai (Department of Material and Engineering, Dalian University of Technology, Dalian 116024, China);Analysis for the structure characteristics and crystal orientation of shellof the conch hemifusus tuba[A];[C];2004
【Secondary References】
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1 LI Jiantao1,2,XU Xiaoli2(1.Materials Science & Engineering Department,Taiyuan University of Science and Technology,Taiyuan 030024,China;2.No.33 Research Institute of CETC,Taiyuan 030006,China);Research on preparation and electromagnetic shielding properties of ITO coated glass[J];Ordnance Material Science and Engineering;2009-04
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4 YU Zhong-xi,GAO Shan-min,ZHANG Jiang,CHEN Jian,QU Rong-jun(School of Chemistry and Materials Science,Ludong University,Yantai 264025,China);Optical and Electrical Properties of ITO Thin Film Prepared by the Sol-Gel Process[J];Micronanoelectronic Technology;2007-05
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8 ZHANG Zhou1,2,LI Xiao-lei1,JI Hui-ming1,ZHOU Yu-gui1 (1. Key Laboratory of Advanced Ceramics and Machining Technology of Ministry of Education,Tianjin 300072,China;2. Tianjin Cement Industry Design & Research Institute Co. Ltd. ,Tianjin 300400,China);Preparation and acetone sensitive characteristics of nano-crystalline ZnFe_2O_4 thin films[J];Materials Science and Technology;2010-01
9 LI Xiao-jie, ZHANG Yue-ju, WANG Jing-xiang, LI Rui-yong, ZHAO Zheng (Department of Engineering Mechanics,Dalian University of Technology,Dalian 116024,China);Investigation on Densification of ITO Ceramic Target by Using Exploring-Compression and Sinter Nano-powder Technique[J];Journal of Materials Science and Engineering;2004-01
10 HUANG You-qi,MA Juan-rong,OU Ying-chun,FU Jing(China Building Material Academy,Beijing 100024,China);Progress in Design and Fabrication of ITO Multilayer Anti-reflective Coating[J];Journal of Materials Science and Engineering;2012-01
China Proceedings of conference Full-text Database 2 Hits
1 ZHAO Fang-hong,WU Yun-long,CHENG Hui-feng,TAN Huan (China Building Materials Academy,Beijing 100024,China);The Influence of the Thickness of Ag Film to ITO-Ag-ITO-Glass[A];[C];2010
2 ZHU Xie-bin~1,YIN Da-peng~1,WANG Hai-tao~1,JIANG Tao~2,ZENG Xiang-chao~1,CHEN Qi (1 Anhui Key Laboratory of High-performance Non-ferrous Metal Materials,Anhui University of Technology and Science,Wuhu,241000,China 2.School of Minerals Processing & Bioengineering,Central South University,Changsha,410083,China);Study on the preparation and its performance of ITO/PVB film[A];[C];2010
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