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《Materials Review》 2007-12
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Research Progress and Key Technologies of ZnO-based UV Detectors

WEI Min DENG Hong WANG Peili LI Yang (School of Microelectronics and Solid-State Electronics,University of Electrionic Science and Technology of China,Chengdu 610054)  
Recently,ZnO has been regarded as promising materials for UV detectors due to its predominant optical and electrical properties.In this paper,the structures and performances of various types of ZnO-based UV de- tectors are introduced,and the latest progress and key technologies of ZnO-based UV detectors such as photoconduc- tive property of ZnO,film's microstructure,doping,and metal-semiconductor contact,are described in detail.To sum up,preparing high quality doping film and improving quantum efficiency are critical for the practical process of ZnO UV detectors.
【Fund】: 国家自然科学基金(No.60390073);; 预研基金(ZJ0508)
【CateGory Index】: TH744
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