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《Materials Review》 2007-S1
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The Analysis of Microstrcucture of Indium Tin Oxide Thin Films Deposited on Polyester Spunbonded Nonwovens

WANG Yingying,WEI Qufu,LI Qi,WANG Jing(Key Laboratory of Eco-Textiles of Ministry of Education,Southern Yangtze University,Wuxi 214122)  
ITO (Indium Tin Oxide) thin films are deposited on PET(polyester) spunbonded nonwovens by RF(radio frequency) magnetron sputtering using ITO sintered as the target and Ar(argon) as the working gas.AFM (Atomic Force Microscope) is also used to characterize the microstructures of ITO thin films deposited on the surface of PET fibers.This paper investigates the effects of several RF sputtering parameters,such as sputtering time,sputtering power,oxygen flow,gas pressure and substrate temperature,on microstructures of ITO thin films.The results indicate that sputtering time and gas pressure mainly affect the uniformity of the thin films.The nanoparticles size of ITO thin films increase with higher sputtering power and oxygen flow influences the crystallization and size of the sputtered nanoparticles on the fibers.It is found that higher substrate temperatures cause the migration of ITO nanoparticles into the surface of PET fiber.
【Fund】: 教育部科学技术研究重点项目(项目编号:106089);; 生态纺织教育部重点实验室开放基金(项目编号:KLET0613)
【CateGory Index】: TB43;TB383.1
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