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《Materials Review》 2012-15
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Construction of Self-assembled Films on Silicon and Their Tribological Behavior

PAN He,TENG Shuhua,DING Cuicui(School of Materials Science and Engineering,China University of Mining and Technology,Xuzhou 221116)  
Several types of self-assembled films fabricated on the silicon substrates are summarized,and the investigation progress on their tribological properties over the past 10 years are mainly introduced.Self-assembled monolayers(SAMs) are effective in reducing the friction coefficient of the silicon surface,but their loading capacity and wear resistance are poor.OTS(octadecyltrichlorosilane)-SAMs are the representative of this type.Double-and multi-layer organic films compensate to some extent for the above defects of the mono-layer films.However,their orientation and stability need to be further optimized.The advent of inorganic/organic composite films in recent years provides a new way to enhance the tribological properties of the silicon surface,which is desirable to become an important direction of future research.
【Fund】: 国家重点基础研究发展计划(973)项目(2007CB607605);; 中央高校基本科研业务费专项资金(2011QNA06)
【CateGory Index】: TN304.12
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