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《Materials Science and Engineering》 2003-05
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Characterisation of Diamond-like Carbon Films Prepared by Electrochemical Deposition

YAN Xing-bin, XU Tao, WANG Bo, YANG Sheng-rong (State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China)  
Diamond-like carbon(DLC) films were deposited on Si substrate by electrolysis in a methanol solution at low temperature.The morphology and microstructure of the resulting DLC films were analyzed by means of atomic force microscopy(AFM),Raman spectroscopy,Fourier transformation infrared spectrometry(FTIR),X-ray photoelectron spectroscopy(XPS),and X-ray excited Auger electron spectroscopy(XAES).As the results,the hydrogenated diamond-like carbon films are smooth and compact,which are not dissolved in benzene or acetone.The nano-hardness of the DLC films is about 16 GPa.The percentage of sp+3 carbon in the DLC films is determined as 60%,based on the corresponding first-derivative XAES spectra of graphite,diamond,and the tested films.Moreover,the growth mechanism of the DLC films in liquid phase electro-deposition is discussed as well.
【Fund】: 国家自然科学基金资助项目 (50 0 2 30 0 1 )
【CateGory Index】: TB43
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