Progress of Study on ZnO Thin Film
Li Jianguang\ Ye Zhizhen \ Zhao Binhui State Key Laboratory of Silicon Zhejinag University Hangzhou 310027
Various methods to prepare the ZnO thin films were reviewed. The main factors influencing the structure of ZnO thin film were introduced. At the same time, the high quality, ZnO thin film growed at C axis orientation on silicon substrate by DC reactive magnetron sputtering was described.
【CateGory Index】： O484