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《Rare Metal Materials and Engineering》 2006-07
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Influence of Oriented Deposition on Thin Film Morphology and Magnetic Properties of NdFeB

Fu Mingxi, Zong Hua, Li Yan, Zha Yanqing (School of Material of Science and Technology, Jiangsu University, Zhenjiang 212013)  
NdFeB thin films were fabricated by magnetron sputtering of direct current excitation in this article. The effects of preheating substrate and oriented deposition on the thin film morphology and the magnetic properties were studied. The experiment results indicated that the NdFeB thin films prepared by orientated deposition and dynamical heating from 200℃ to 500℃ then kept for 10 minutes have columnar crystals perpendicular to films’ surface in one direction, resulting their anisotropic magnetic property, and higher coercive force and H⊥/ H∥.
【Fund】: 江苏省教育厅高校科学研究项目(03KJD430067)
【CateGory Index】: TB383.2
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