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《Rare Metal Materials and Engineering》 2007-01
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Study on Electrical and Optical Properties of Flexible Transparent Conductive ITO Film

Sun Yi1, Diao Xungang1, Yang Meng1, Wu Zhe1 , Shu Yuanjie2 (1. Beijing University of Aeronautics and Astronautics, Beijing 100083, China) (2. Institute of Chemical Materials, CAEP, Mianyang, 621900, China)  
Indium tin oxide (ITO) thin films were deposited on flexible polyester substrates at room temperature by DC magnetron sputtering. The effects of the oxygen content, film thickness and the DC bias voltage on the structure, electrical and optical properties of the ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe. The preparation condition of the ITO films deposited on flexible substrates was optimized. Sheet resistance and the average visible transmittance of the best ITO film reach 6 ?/□ and 85.6%, respectively.
【Fund】: 国家自然科学基金重点项目(90305026);; 中国工程物理研究院双百人才基金(2005R0504)资助
【CateGory Index】: TB383.2
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