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《Journal of Changsha University of Electric Power(Natural Science)》 2003-03
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Application of Predictive Feedforward Compensation Control to Long Stroke Motor in Scanning Wafer Stage of Lithography

LI Hong1,2, ZHOU Yunfei1 (1.National Engineering Research Center of NC System Technology,Huazhong University of Science & Technology,Wuhan 430074,China; 2.Dept. of Electric Power Engineering,Changsha University of Electric Power,Changsha 410077,China)  
A nmlevel trackerr precision is required while scanning and exposing the wafer stage of 0.1 um lithography. A complex movement can meet the requirement by using linear motor to realize the low precison long stroke and Lorentz motor to the high precision short stroke. In order to reduce the movement scope and acceleration of short stroke motor, the position control precision of linear motor must be improved. An IP control arithmetic is introduced for high precision forever magnetic AC synchro linear motor and an optimal predictive feedforward compensation method is proposed, which performs perfectly in improving the realtime tracking ability, enforcing antidisturbance ability, and meeting the requirement of highvelocity and highprecision position control of linear motor.
【Fund】: 国家863计划资助项目(2001BA203B01)
【CateGory Index】: TN305.7
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