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《Journal of Test and Measurement Technology》 2009-03
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Reconstruction of the 3D Surface Profile of Micro Device Based on White-Light Interference Measurement Technology

LI Qiuzhu,LIU Yi,NIU Kangkang,LIU Jun,CHOU Xiujian(National Key Laboratory for Electronic Measurement Technology of North University of China,Taiyuan 030051,China)  
Vertical scanning interferometry can realize the reconstruction of surface profile of micro structures,especially for step structures. It is extensively applied to micro systems due to its fast computing speed and high accuracy and resolution.In this paper,the interferograms being got value from the micro system analyzer are analyzed using vertical scanning interferometry,and the 3D surface profile of the micro step structure is reconstructed.The interferograms meet the demands of the vertical scanning interferometry,and the computing value of the step-height is consistent with that of the real structure value.The method attains the lateral resolution of 1.6 μm and the vertical resolution of 0.05 μm.
【Fund】: 国家自然基金重点资助项目(5053503050730009)
【CateGory Index】: TP391.41
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【Citations】
Chinese Journal Full-text Database 5 Hits
1 YANG Xu-dong School of Mechanical Engineering,Guizhou University,Guiyang 550003,China CHEN Yu-rong XIE Tie-bang School of Mechanical Engineering,Huazhong University of Science and Technology,Wuhan 430074,China;A Large Range General Profilometer[J];Journal of Beijing University of Technology;2008-04
2 XUE Chen-yang,KONG Fan-hua,ZHANG Wen-dong,XIONG Ji-jun,ZHANG Bin-zhen,ZHENG Li-na (National Key Laboratory For Electronic Measurement Technology, North University of China, Taiyuan 030051, China);Measuring MEMS Deep-Trench Structures with White Light Interference[J];Chinese Journal of Sensors and Actuators;2006-05
3 WANG Hai-shan1,2,SHI Tie-lin1,2,LIAO Guang-lan1,2,LIU Shi-yuan1,2,ZHANG Wen-dong3 ( 1. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China; 2. Division of Optoelectronic Materials and Micronano Manufacture, Wuhan National Laboratory for Opto-electronics, Wuhan 430074, China; 3. National Key Laboratory For Electronic Measurement Technology , North University of China, Taiyuan 030051, China );Profilometer Based on Interferometry and Micro Vision System[J];Opto-Electronic Engineering;2008-07
4 YANG Tian-bo,GUO Hong,LI Da-cheng(State Key Laboratory Precision Measurement Technology and Instrument,Tsinghua University,Beijing 100084,China);The summary of algorithms for white-light scanning interferometry[J];Optical Technique;2006-01
5 LIU Bo; ZHENG Wei; QIANG Xi-fu; JIANG Jian-feng( Instrument & Apparatus College of Harbin Univ. Sci. Tech., Harbin 150080 China; Computer & Electrical Engineering College of Harbin Institute of Technology, Harbin 150001 China);3D Surface Profile Measurement Based on the Phase-shift Interfering Technique[J];JOURNAL OF HARBIN UNIVERSITY OF SCIENCE AND TECHNOLOGY;1999-03
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Chen Jingquan Er Lianjie Liu Zhenghua Wu Yunjie(School of Automation Science and Electrical Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100083, China );High speed and accuracy position measuring method based on inductosyn[J];Journal of Beijing University of Aeronautics and Astronautics;2005-04
2 PENG Dong-lin,LIU Xiao-kang,ZHANG Xing-hong,CHEN Xi-hou(School of Electronic Information and Automation,Chongqing Institute of Technology,Chongqing 400050,China);Study on the Time Grating Displacement Sensor[J];Journal of Chongqing Institute of Technology;2006-05
3 WANG Xian-quana,WU Minb,DONG Cuna,ZHUANG Qiu-huia(a.School of Electronic Information and Automation;b.Chongqing Automobile College, Chongqing Institute of Technology,Chongqing 400050,China);Mechanism of Induction Based on Electromagnetic Mutual Induction Sensor and a Novel Displacement Sensor[J];Journal of Chongqing Institute of Technology(Natural Science);2008-04
4 WANG Xian-quana,WU Minb,ZHU Gea,FENG Ji-qina(a.School of Electronic Information and Automation;b.Chongqing Institute of Automobile,Chongqing University of Technology,Chongqing 400050,China);Two-Phase Unequal-pitch Time-grating Displacement Sensor Based on Harmonic Wave Correcting Method[J];Journal of Chongqing Institute of Technology(Natural Science);2009-04
5 LUO Li-ping, XIONG Zhi-kai~, ZHU Hong-tao, XIONG Rui-wen (Mechanical and Electronic Engineering School, NanChang University, Nanchang 330029, China);The Whole Continuous Columnsyn Sensor Mathematics Model[J];Chinese Journal of Sensors and Actuators;2006-04
6 MAO Qian-min, LIU An-kun, SHEN Wei-min, ZHANG Zeng-yao (College of Metrology Technology and Engineering, China Jiliang University, Hangzhou 310018,China);Research on Fusion Measurement System of Grating and Capacitive Grating with Nanometer Resolution[J];Chinese Journal of Sensors and Actuators;2006-05
7 ZHANG Zhili, LI Guoying(The Second Artillery Engineering Institute,Xi'an 710025,China);Azimuth measure system of the theodolite based on the round inductive synchronizer[J];Journal of Transducer Technology;2003-01
8 WANG Yan-gang 1,PENG Dong-lin1,YI Wen-cui 2,ZHU Ge1(1.Chongqing Institute of Technology,Chongqing 400050,China;2.Chongqing Communication Institute,Chongqing 400035,China);Application of ping-pong operation in incremental time-gratingsignal processing circuit[J];Electric Power Automation Equipment;2007-01
9 ZENG Huan lang 1, CHEN Wei qiang 2, CHEN Wen ge 1(1.Guangdong University of Technology,Guangzhou 510090,China;2.Maoming Thermoelectic Plant,Guangdong 000000,China);Research of CAT on the Synchronous Position Error for Cylinder[J];Engineering Design;2000-04
10 ZHANG Wen-ming; DENG Wen-he(Institute of Optics and Electronics, ChineseAcademy of Sciences, Chengdu 610209, China);Design of Two-Axis Calibration Rotating Platform for High Precision Star Sensor[J];OPTO-ELECTRONIC ENGINEERING;1999-S1
【Secondary Citations】
Chinese Journal Full-text Database 7 Hits
1 HE Yong hui 1, JIANG Jian feng 2, ZHAO Wan sheng 3 (1 Baosteel Research Institute, Shanghai 201900, China) (2 Shanghai Jiaotong University, Shanghai 200030, China) (3 Harbin Institute of Technology, Harbin 150001, China);Surface 3D profiler based on scanning white light interferometry method[J];Optical Technology;2001-02
2 ZHAO Xuhui, QU Xinghua, YE Shenghua, HE Ying, SONG LimeiUniversity, TianJin300072, China);Optic testing methods and instruments for MEMS[J];Optical Technology;2003-02
3 ZHOU Ming-cai, BAI Jing-peng, XIE Yong-jun, LAI Wu-xing, SHI Tie-lin (Institute of microsystem, Huazhong university of science and technology, Wuhan 430074, China);MEMS dynamic testing system and data processing[J];Optical Technique;2004-04
4 YANG Tian-bo,GUO Hong,LI Da-cheng(State Key Laboratory Precision Measurement Technology and Instrument,Tsinghua University,Beijing 100084,China);The summary of algorithms for white-light scanning interferometry[J];Optical Technique;2006-01
5 DAI Rong~(1,2),XIE Tie-bang~1,CHANG Shu-ping~1 (1.School of Mechanical Science & Engineering,Huazhong University of Science and Technology,Wuhan 430074,China) (2.School of Mechannical and Electronic Engineering,Wuhuan University of Technology,Wuhan 430070,China);A vertical scanning white-light interfering profilometer[J];Optical Technique;2006-04
6 Ding Zhihua;Wang Guiying;Wang Zhijiang(Shanghai Institute of Optics & Fine Mechanics, Academia Sinica, Shanghai 201800);Analysis of Phase-shifting Error in Phase-shifting Interferometric Microscope[J];ACTA METROLOGICA SINICA;1995-04
7 GUO Tong, HU Chun-guang, HU Xiao-dong, LI Da-chao, JIN Cui-yun, FU Xing, HU Xiao-tang(State Key Laboratory of Precision Measuring Technology an d Instruments, Tianjin University, Tianjin 300072, China);Stroboscopic Interferometer for Dynamic MEMS Characterization[J];Nanoteohnology and Precision Engineering;2004-04
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