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《Journal of Sichuan Ordnance》 2011-04
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Review on Research of MEMS Initiator

LI Wei1,JIANG Xiao-hua2,JIANG Dao-jian2(1.Especial device military representative office of Mianyang Area for Navy,Mianyang 621900,China; 2.Chemical Industry material Institute,China Engineering physics Academe,Mianyang 621900,China)  
The paper introduced the composed principle of MEMS initiator,analyzed the actuality in home and abroad,and summarized up the key technology related to the research on MEMS initiator.The research result shows that the MEMS initiator can realize the micromation,structure integration and dexterous function of initiating explosive devices by means of technology integration such as micri-electromechanical technology,nano-energy material and micro-structure detonation,and it is easy to form a general standardization initiation module.
【CateGory Index】: TH703
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【Citations】
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【Co-citations】
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1 DENG Jun-yong 1 ,FENG Yong-jian 2(1.Department of Mechanical&Electronic Engineering,Xiamen University,Xiamen361005,China;2.Pen Tung Sah MEMS Research Center of Xiamen University,Xiamen361005,China);Characteristic and application of polyimide in MEMS[J];Semiconductor Information;2003-04
2 WANG Yan hua,SUN Dao heng (Dept of Machinery Electronic Engineering,Xiamen University,Xiamen 361005,China);The fabrication technology of silicon tip[J];Micronanoelectronic Technology;2003-Z1
3 XIONG Tao 1,YI Xin jian 2,CHEN Si hai 3,CHEN Ming xiang 3,ZHOU Shao bo 3 (1. Department of Opto Electronics Engineering; 2.Naional Key Lab of Laser Technology; 3.Institute of Microsystem,Huazhong University of Sciencet & Technology,Wuhan430074,China);Design and fabrication of humidity sensor for MEMS hermetic package test[J];Micronanoelectronic Technology;2003-Z1
4 CHEN Gui-hui1,2,ZHANG Wan-li2,PENG Bin2,JIANG Hong-chuan2(1.Physics department of Xichang College,Xichang 615022,China;2.School of Microelectronic & Solid State Electronic of UESTC,Chendu 610054,China);Study of MEMS microactuators[J];Micronanoelectronic Technology;2004-09
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