Magnetic and Structural Properties of NiZn Targets and Thin Film
ZHAO Xiao-ning, LAN Zhong-wen, SUN Ke, YU Zhong, JIANG Xiao-na State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
The NixZn1-xFe2O4(x=0.2~0.8)ferrite targets were prepared by solid state reaction method, then the effects of Ni content on the properties of NiZn targets were investigated. And based on study on targets, Ni0.5Zn0.5Fe2O4 ferrite thin films were prepared on single-crystal Si(100) substrate by radio frequency (RF) magnetron sputtering technique. The XRD pattern of target materials showed that, with the increase of Ni content, diffraction peaks of target samples shift to higher angle, which indicates lattice constant and average grain size decrease monotonously. At the optimal condition of x=0.5~0.6, NixZn1-xFe2O4 ferrite target has a larger Bs and lower Hc. The results of films annealed at 800℃ indicated that the film exhibits spinel structure, preferential (400) orientation, saturation magnetization (Ms) of 310kA/m and in-plane coercivity (Hc) of 8.833kA/m, respectively.