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《Information Recording Materials》 2008-03
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Effects of Annealing Temperature on the Structure of ITO Films Properties When Quenching in Air and N_2

PAN Hong-tao ZHOU Bing-qing CHEN Xia LI Li-meng (College of Physics and Electron Information,Inner Mongolia Normal University,Huhhot 010022,China)  
Using InCl_3·4H_2O and SnCl_4·5H_2O as raw materials,ITO transparent thin films were prepared on com- mon glass substrate by the sol-gel spin-coating process.The effects of heat-treatment temperature on the grain size,optical and electrical properties of ITO thin films were investigated by x-ray diffraction,UV-Vis transmission spectra and four- probe electrical measurement.
【Fund】: 国家自然科学基金(50662003);; 内蒙古师范大学研究生基金(YJS06045)
【CateGory Index】: O484
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