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MENG Liang;HUANG Wei;TU Jiangping;LIU Maosen (Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027)  
Polycrystalline FeS2 thin films were prepared by thermally sulfurating iron layers sputtered on glass substrates. The effects of sulfidation temperature and time on composition, crystalline morphology and resistivity have been investigated under 80 kPa sulfur pressure. Test results shown that there was a nearly complete crystallization from iron into polycrystalline FeS2 under annealing 20-30h at 400℃. As a result of the sulfidation conditions above, the films could have approximate FeS2 stoichiometrical composition and display a uniform microstructure. With the elevation of sulfidation temperature, the grain size of FeS2 crystalline and the resistivity of film samples increased significantly. There was an insignificant effect of sulfidation time on crystalline morphology at 400℃ when FeS2 grains formed fully.
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