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《Journal of Northeastern University(Natural Science)》 2018-02
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Modelling and Simulation of a Surface Stress-Included Microcantilever-based Mass Sensor

MA Shu-jun;XIU Qiang;School of Mechanical Engineering & Automation, Northeastern University;  
A theoretical model,which takes surface stress into account by applying Rayleigh-Ritz theorem,for a cantilever-based mass sensor is proposed,in order to consider the surface stress induced by the adsorbed layer or coating of different materials on the cantilever resonator and to further enhance the accuracy and performance of the cantilever sensor. Stress parameter is introduced into the governing equation of the cantilever vibration to adjust the mode shape function,and the influence of the surface stress towards the vibration is systematically analyzed.With this model,the position and mass of the particle can be precisely determined through the frequency shifts of the microcantilever before and after the particle adsorption. The accuracy and the reliability of this method were validated by finite element simulation.
【Fund】: 国家自然科学基金资助项目(51505076);; 辽宁省自然科学基金资助项目(2015020105);; 中央高校基本科研业务费专项资金资助项目(N140304010 N150308001);; 辽宁省高等学校创新团队项目(LT2014006)
【CateGory Index】: TP212
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