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《Electroplating & Pollution Control》 2007-03
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Production of TiO_2 Film with Vacuum Deposition

CHEN Ying,WANG Yang,ZHANG Yan-yin(Key Laboratory of Opto-electronic Technology and Intelligent Control,Ministry of Education,Lanzhou Jiaotong University,Lanzhou 730070,China)  
The environmental material of TiO_2 thin film is prepared using ZDL-2051 automotive lighting vacuum metallising system with the method of vacuum evaporation deposition technique.Its morphological characteristic is analyzed using SEM and EDS.The result indicates that the surface of thin film is uniform,fine and crackless.The methods for preparing TiO_2 thin film are discussed.
【CateGory Index】: TB383.2
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