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《Journal of Earthquake Engineering and Engineering Vibration》 2007-06
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Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement

DU Min1,LIN Wei1,LU Peng1,LI Jianli2(1.Institute of Disaster-prevention Science and Technology,Sanhe 065201,China;2.Beijing University ofAeronautics and Astronautics,Beijing 100083,China)  
Micro-electromechanical silicon accelerometer can be applied to various vibration measurements.For comprehending its performance and improving its precision,this paper describes the microstructure and operation principle of a finger-shaped micro-electromechanical silicon accelerometer.The stiffness of microstructure was calculated theoretically.The static,dynamic and thermal characteristics were analyzed by using ANSYS software and the accuracy of theoretical model was verified.It is shown that the microstructure dimension is the main factor causing the performance of FMSA.The paper provides a theory for improving the performance of accelerometer.
【Fund】: 校级基金项目(06310)
【CateGory Index】: P315.62
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【Citations】
Chinese Journal Full-text Database 7 Hits
1 XU Hong-qiang, CHEN Hua-ling (Inst of Mech Engin,Xi'an Jiaotong University,Xi'an 710049,China);Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer[J];Journal of Transducer Technology;2004-07
2 LI Caihua,KONG Qingyan (Institute of Engineering Mechanics, China Seismological Bureau, Harbin 150080, China) (Harbin University of Commerce, Harbin 150028, China);Dam-reservoir Earthquake Monitoring System Part Two Variable-distance Capacitance Accelerometer[J];Hydropower Automation and Dam Monitoring;2006-03
3 Jin Xing~(1,2), Ma Qiang~1, Li Shanyou~1(1.Institute of Engineering Mechanics, China Earthquake Administration, Harbin 150080, China; 2.Institute ofGeotechnical Engineering,Nanjing University of Technology , Nanjing 210009, China);Real-time simulation of ground displacement and acceleration using digital velocity record[J];Earthquake Engineering and Engineering Vibration;2004-06
4 Du Meiqi(Institute of Engineering Mechanics, State Seismological Bureau);STATIC CALIBRATING METHOD AND DEVICE FOR ACCELEROMETERS[J];EARTHQUAKE ENGINEERING AND ENGINEERING VIBRATION;1996-02
5 Li Ming Zhou Bailing (Department of Instrument Science and Engineering, Southeast University, Nanjing 210096);Finite_Element Models and Dynamic Analysis of Micro Silicon Accelerometer[J];Journal of Southeast University;1999-05
6 Yang Xueshan Huang Zhenping (institute of Engineering Mechanics, State Seismological Bureau, Harbin 150080);A MODEL MJ OF MICRO-VIBRATION ACCELEROGRAPH[J];WORLD INFORMATION ON EARTHQUAKE ENGINEERING;1997-01
7 QIN Jun hua,DONG Jing xin (Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084);Design and analysis of a multi-finger micromechanical silicon accelerometer[J];Journal of Astronautics;2002-01
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 REN Jie , FAN Shang-chun (School of Instrument Science & Opto-electronics Engineering,Beihang University 100083,China);A Dual-Axis Capacitive Micromechanical Accelerometer[J];Chinese Journal of Sensors and Actuators;2006-05
2 ;Structure Design & Analysis On Variable-Capacitance Micromechanical Accelerometer[J];Sensor World;2006-08
3 YANG Xue-shan HUANG Hao-hua (Institute of Engineering Mechanics, China Seismological Bureau, Harbin 150080, China);Pick-up of the type of closed-cycle pole compensation[J];Earthquake Engineering and Engineering Vibration;2001-03
4 Yang Qiaoyu, Lou Liangqiong, Yang Lizhi(Institute of Engineering Mechanics, China Earthquake Administration, Harbin 150080,China);Model 941B ultra-low frequency vibration gauge[J];Earthquake Engineering and Engineering Vibration;2005-04
5 Lin Jiansheng, Lin Zijian, Xie Wenjie, Chen Junfeng, He Xingyuan and Wang Jianxin (Engineering Seismic Research Center of Quanzhou, Earthquake Administration of Fujian Province, Quanzhou 362000, China);Using digital velocity records simulate acceleration time history and synthesize site design earthquake[J];Seismological and Geomagnetic Observation and Research;2006-06
6 Jin Xing1),2),3),4) , Liao Shirong4)and Chen Feiwen4)1) Institute of Engineering Mechanics,China Earthquake Administration, Haerbin 150090, China2) Fuzhou University, Fujian Province 350002, China3) Nanjian University of Technology, Jiangsu Province 210009, China4) Earthquake Administration of Fujian Province, Fuzhou 350003, China;The test running of Real-time Earthquake Information System for province-level seismic network[J];Seismological and Geomagnetic Observation and Research;2007-01
7 Jin Xing1,2) Kang Lanchi1) Ou Yiping3) 1) Fuzhou University, Fuzhou 350002, China 2) Earthquake Administration of Fujian Province, Fuzhou 350003, China 3) Fujian Architectural and Light Textile Design Institute, Fuzhou 350003, China;A study on ground motion attenuation relation for small to moderate earthquakes in Fujian region, China[J];Acta Seismologica Sinica;2008-03
8 JIN Xing1,2), KANG Lan-chi1) OU Yi-ping3) 1) Fuzhou University, Fuzhou 350003, China 2) Earthquake Administration of Fujian Province, Fuzhou 350003, China 3) Fujian Architectural and Light Textile Design Institute, Fuzhou 350003, China;Ground motion attenuation relation for small to moderate earthquakes in Fujian region, China[J];地震学报(英文版);2008-03
9 Lanchi Kang 1, and Xing Jin 1,2 1 Fuzhou University, Fuzhou 350003, China 2 Earthquake Administration of Fujian Province, Fuzhou 350003, China;Ground motion attenuation relations of small and moderate earthquakes in Sichuan region[J];地震学报(英文版);2009-03
10 Jin Xing Liao Shirong Chen Feiwen (1.Earthquake Administration of Fujian province; 2. Institute of Engineering mechanics,China Earthquake Administration; 3. Fuzhou University ; 4. Nanjing industry university);Study on real time fast report system in seismic network[J];Fujian Seismology;2006-Z2
【Secondary Citations】
Chinese Journal Full-text Database 9 Hits
1 ZHENG Ying-bin, SU Wei, HE Xiao-ping (Inst of Elct Engin,China Academy of Engineering Physics,Mianyang 621900,China);Coupled electrostatic-mechanical analysis for a multi-finger micro-accelerometer[J];Journal of Transducer Technology;2002-05
2 LI Cai-hua~(1, 2)(1.Inst of Engin Mechanics,China Seismological Bureau,Harbin 150080,China;2.Harbin Beiao Vibration Technology Co.Ltd.,Harbin 150080,China);Design analysis of force balance accelerometer[J];Journal of Transducer Technology;2005-08
3 JIN Xing, MA Qiang, LI Shanyou(Institute of Engineering Mechanics, China Seismological Bureau, Harbin 150080, China);Comparison of four numerical methods for calculating seismic response of SDOF system[J];Earthquake Engineering and Engineering Vibration;2003-01
4 MA Qiang, JIN Xing, LI Shanyou(Institute of Engineering Mechanics, China Seismological Bureau,Harbin 150080,China);Real-time algorithm of seismic dynamic response for SDOF system[J];Earthquake Engineering and Engineering Vibration;2003-05
5 Liu Ruifeng, Chen Peishan, Dang Jingping, Zhang Weiqing and Ren Kexin(Institute of Geophysics, State Seismological Bureau, Beijing 10081, China);The application of imitation for broad band digital seismic recording[J];SEISMOLOGICAL AND GEOMANGNETIC OBSERVATION AND RESEARCH;1997-03
6 He shaolin and Li hailiang(The Earthquake Research Institute of Lanzhou, Lanzhou 730000 China) (Institute of Geophysics, State Seismological Bureau, Beijing 100081 China);The processing research of digital seismic data: retrieval of actual ground motion[J];SEISMOLOGICAL AND GEOMANGNETIC OBSERVATION AND RESEARCH;1997-06
7 Jin Xing 1, 2) Ma Qiang 1) Li Shanyou 1) 1) Institute of Engineering Mechanics, China Earthquake Administration, Harbin 150080, China2) Nanjing University of Technology, Nanjing 210009, China;REAL-TIME SIMULATION OF GROUND DISPLACEMENT BY DIGITAL ACCELEROGRAPH RECORD[J];Acta Seismologica Sinica;2005-01
8 YUAN Guang, DING Henggao, GAO Zhongyu DONG Jingxin Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;Design a multi finger silicon micromechanical accelerometer[J];JOURNAL OF TSINGHUA UNIVERSITY(SCIENCE AND TECHNOLOGY);1998-11
9 PENG Bo, HE Xiaoping, SU Wei (Electronic Engineering Research Institute of China Academy of Engineering Physics, Mianyang, Sichuan 621900, China);A Micro-machined Electrostatic Servo Accelerometer[J];JOURNAL OF CHINESE INERTIAL TECHNOLOGY;2000-01
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