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《Electronics Optics & Control》 2011-05
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Static Characteristics of Auto-Focusing Servo System Based on Critical Angle Method for Laser Direct Writing

LIANG Fengchao1,2(1.Changchun Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China; 2.Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun 130033,China)  
In order to improve the shielding effectiveness and infrared transmittance of metallic mesh,it is required to narrow the width of laser direct writing line and to improve its uniformity.The error of the shape of the concave spherical substrate,uneven thickness of the photoresist film,or shake of machine shafting could result in defocusing during laser direct writing,which will affect the line width and its uniformity.The promising approach to avoid defocusing is to detect and compensate the defocusing error via an auto-focusing servo system.Critical angle method was selected for detecting and compensating the defocusing error.The preamplifier was designed and the weak Focus Error Signal(FES) was amplified successfully.The auto focus servo system was established and the static characteristic curve of FES was demarcated.The static state experimental results show that the distinguishable displacement is ±40 nm with the linear range of about ±5 μm,which can satisfy the design requirements.
【Fund】: 国防科技预研基金资助项目(10.4.2.ZK1001)
【CateGory Index】: V218
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