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《Equipment For Electronic Products Manufacturing》 2002-04
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The Situation and Development Tendency for MEMS both Domestic and Overseas

TONG Zhi yi,ZHAO Xiao dong(The No.45 Institute Research of CETC,PingLiang,74000,China)  
This paper describes the development process of Microelectro mechanical system (MEMS),the research and the application situation of MEMS and their tendency is also described. Through the compare with the gaps between domestic and overseas MEMS RD,put forward a proposal to pushing on MEMS.
【CateGory Index】: TH703
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