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《Equipment For Electronic Products Manufacturing》 2004-02
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RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY

ZHU Yu,YIN Wen-sheng,DUAN Guang-hong(Department of Precision Instruments,Tsinghua University)  
Researches about ultra-precision stages of stepper and scanner lithography are introduced.In the ultra-precision motion control stage built for experiments,linear guide air bearing,linear motors and linear encodes are adopted to make up of two parallel linear coarse motion systems.Lorentz motors drive fine stages with air bearing folded on the coarse motion systems.The dual-frequency laser interferometer completes the ultra-precision position detection and feedback.The two linear motion systems can realize the research of the synchronism scan motion and compose manifold x-y ultra-precision motion systems.The ultra-precision motion tests based on the test-stage are introduced and the motion positioning preci-sion has realized12nm.
【CateGory Index】: TN305.7
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