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《JOURNAL OF UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA》 2000-03
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A Novel Method for Refractive Microlens Array Fabrication

Li Xuemin ;Lu Guowei (Institute of Applied Physics, UEST of China Chengdu 610054)Zhou Lishu (Institute of Optics Electronics, Chinese Academy of Science Chengdu 610041 )  
In this paper, a novel method for refractive microlens array fabrication is introduced. Its main idea is similar to that of gray-scale mask method. The mask needed is made through laser directwriting technique. Exposed only once, the profile of refractive microlens array is formed on the photoresist. The figures of the test are presented for the microlens array obtained.
【CateGory Index】: TH74
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【Citations】
Chinese Journal Full-text Database 1 Hits
1 Hou Desheng, Du Chunlei Qiu Chuankai, Bai Linbo (State Key Laboratory of Optical Technology for Microfabrication,Institute of Optics & electronics, Chinese Academy of Sciences,Chengdu,610209);Model ISI 2802 Laser Direct Write System and Its Applications[J];OPTO-ELECTRONIC ENGINEERING;1997-S1
【Co-citations】
Chinese Journal Full-text Database 5 Hits
1 SHEN Ting-zheng1, L Hai-bao1, QI Xin-min2, GAO Yi-qing2, ZHU Xiao-jin2 (1. Institute of Electromechanical Engineering, National University of Defense Technology, Changsha 410073, China ; 2. Departmetn of Measurement and Control, Nanchang Institute of Aeronautical Technology, Nanchang 330034, China);Study on gray-scale masks manufacture with electrically addressed spatial light modulators[J];Opto-electronic Engineering;2004-07
2 XU Bing, WEI Guo-jun, CHEN Lin-sen(Institute of Information Optical Engineering, Soochow University, Suzhou 215006, China);Research Advances in Technology of Laser Direct Writing[J];Optoelectronic Technology & Information;2004-06
3 WEI Guo-jun, XU Bing, CHEN Lin-sen(Institute of Information Optical Engineering, Soochow University, Suzhou 215006, China);Vectorized Laser Direct Writing of DOVID's with Line-grating Scanning[J];Optoelectronic Technology & Information;2004-06
4 CHEN Linsen,XIE Jianfeng,SHEN Yan,WANG Zhenhua,LU Zhiwei (Institute of Information Optical Engineering,Suzhou University,Suzhou 215006,China);Fabrication of 3D Image Laser Printing System with SLM[J];Laser & Infrared;2003-05
5 Chen Linsen, Xie Jianfeng, Shen, Yan, Wang Zhenhua, Lu Zhiwei(Institute of Information Optical Engineering, Soochow University, Suzhou 215006, China);A Novel Laser Printing System for Digital Three-dimensional Diffraction Images[J];Chinese Journal of Scientific Instrument;2005-04
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Song Dengyuan (Department of Electronics and Informational Engineering,Hebei University,Baoding 071002) Wang Xiaoping (Zhangjiakou Vocational University,Zhangjiakou 075000);Laser Holographic Lithography and Applications[J];SEMICONDUCTOR TECHNOLOGY;2000-02
2 FENG Bo-ru 1 ,ZHANG Jin 1,2 ,ZONG De-rong 1 ,JIANG Shi-lei 1 ,SU Ping 1,2 ,CHEN Bao-qin 3 ,CHEN Fen 4(1.State Key Lab of Optical Technologies for Microfabrication,Institute of Optics&Electronics,Chinese Academy of S;Study of interferometric lithography without masks[J];Semiconductor Information;2002-03
3 TIAN Wen-chao,JIA Jian-yuan (School of Electro-Mechanic Engineering,Xidian University,Xian710071,China);Adhesion research of digital micromirror nano-contact[J];Semiconductor Information;2002-10
4 DU Jing-lei 1 ,SHI Rui-ying 2 ,CUI Zheng 3 ,GUO Yong-kang 1(1.Physics Department ,Sichuan University,Chengdu610064,China;2.Microelectronics R&D Center,The Chinese Academy of Scienes,Beijing100029,China;3.Rutherford Appleton Laboratory,Chilton,Didcot,Oxon OX110QX,UK);Proximity effects during mask fabrication[J];Semiconductor Information;2002-11
5 REN Zhibin~1,ZHU Lisi~2,ZENG Hao~3,JIANG Huilin~1(1.Institute of Space Optical Electronic Technology,Changchun University of Science and Technology,Jilin Changchun 130022;2.Institute of Opto-Electronics Information,Changchun University of Science and Technology,Jilin Changchun 130012;3.Institute of Opto-Electronics Engineering,Changchun University of Science and Technology,Jilin Changchun 130022);Fabrication Technology of Microlens Array by Melting Photoresist[J];;2006-04
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7 ZHANG Jin1,2, FENG Bo-ru2, GUO Yong-kang1, JIANG Shi-lei2, ZONG De-rong2, DU Jing-lei1, ZENG Yang-su1, GAO Fu-hua1 (1. Department of Physics, Sichuan University, Chengdu 610064, China; 2. State Key Laboratory of Optical Technologies for Microfabrication,;Laser Interference Photolithography for Fabricating Periodic Patterns in Large Area[J];Opto-electronic Engineering;2001-06
8 LIU Yu-ling (Department of Instrument Science and Engineering, Zhejiang University, Hangzhou 310027, China);Identification of Acousto-Optic Modulator Model and Design of Control System for Light Power[J];Opto-electronic Engineering;2002-05
9 LIANG Yi-yong ( State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027, China );Control techniques based on referenced defocus amount[J];Opto-electronic Engineering;2004-01
10 LIU Juan, FENG Bo-ru, ZHANG Jin ( 1. State Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics, The Chinese Academy of Sciences, Chengdu 610209, China ; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China );Imaging interferometric lithography and its spatial frequency analysis[J];Opto-electronic Engineering;2004-10
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