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《POWER ELECTRONICS》 1997-04
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A Precise High voltage Power Supply of Combined regulation Type

This paper recommends a precise high voltage power supply for a 30kV electron beam exposure machine.The power supply adopts direct regulation combined with secondhand regulation,centralized compensation combined with dispersed compensation,properly handles key techniques.All specifications of the power supply satisfy high precision requirements.
【CateGory Index】: TM91
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