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《Journal of Dalian University of Technology》 2006-03
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Research on application of DLC films to solving MEMS stick

LI Xin~(1,2),TANG Zhen-an~(*1),XU Jun~1,BAO Hai-fei~3(1.School of Electr.and Inf.Eng.,Dalian Univ.of Technol.,Dalian 116024,China;2.School of Inf.Sci.and Eng.,Shenyang Univ.of Technol.,Shenyang 110023,China;3.Shanghai Inst.of Microsyst.and Inf.Technol.,Chin.Acad.of Sci.,Shanghai 200050,China)  
The problem of stick in microelectromechanical systems(MEMS) is introduced,and the cause of the stick and how to solve the stick are evaluated.Diamond-like carbon(DLC) films are prepared under the polysilicon cantilever beam by the sacrificial layers etching technique.The length of the longest cantilever beam,which doesn′t adhere to the substrate,is checked using scanning electron microscope(SEM).When the DLC film exists,the average longest length is about 145 μm.While the DLC film doesn′t exist,the average critical length is shorter than 80 μm.The adhesion force of the DLC films is as low as 7 nN measured by atomic force microscope(AFM),whereas the adhesion force of the Si surface is approximately 20 nN.These results indicate that the capillary force and the adhesion force between cantilever beam and substrate are reduced,and the problem of stick of the cantilever beam is alleviated.
【Fund】: 国家自然科学基金资助项目(50135040);; 传感技术联合开放研究实验室开放课题资助项目(skt0408)
【CateGory Index】: TH703
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