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《Journal of Dalian University of Technology》 2006-03
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Research on application of DLC films to solving MEMS stick

LI Xin~(1,2),TANG Zhen-an~(*1),XU Jun~1,BAO Hai-fei~3(1.School of Electr.and Inf.Eng.,Dalian Univ.of Technol.,Dalian 116024,China;2.School of Inf.Sci.and Eng.,Shenyang Univ.of Technol.,Shenyang 110023,China;3.Shanghai Inst.of Microsyst.and Inf.Technol.,Chin.Acad.of Sci.,Shanghai 200050,China)  
The problem of stick in microelectromechanical systems(MEMS) is introduced,and the cause of the stick and how to solve the stick are evaluated.Diamond-like carbon(DLC) films are prepared under the polysilicon cantilever beam by the sacrificial layers etching technique.The length of the longest cantilever beam,which doesn′t adhere to the substrate,is checked using scanning electron microscope(SEM).When the DLC film exists,the average longest length is about 145 μm.While the DLC film doesn′t exist,the average critical length is shorter than 80 μm.The adhesion force of the DLC films is as low as 7 nN measured by atomic force microscope(AFM),whereas the adhesion force of the Si surface is approximately 20 nN.These results indicate that the capillary force and the adhesion force between cantilever beam and substrate are reduced,and the problem of stick of the cantilever beam is alleviated.
【Fund】: 国家自然科学基金资助项目(50135040);; 传感技术联合开放研究实验室开放课题资助项目(skt0408)
【CateGory Index】: TH703
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【References】
Chinese Journal Full-text Database 1 Hits
1 LIANG Ming-fu,ZHAO Xiang(Yangzhou Polytechnic College,Jiangsu Yangzhou 225009 PRC);Reliability for Microcantilever Device Manufacture Craft[J];Jiangxi Science;2009-03
【Citations】
Chinese Journal Full-text Database 1 Hits
1 ZHANG Xi-hui 1,2 ,LMiao 2 ,MIAO Yong 1(1.Hebei University of Technology,Tianjin300130,China;2.The13th Electronic Research Institute,CETC,Shijiazhuang050051,China);The elimination of adhesion in micro-mechanical devices[J];Micronanoelectronic Technology;2003-12
【Co-citations】
Chinese Journal Full-text Database 1 Hits
1 LIU Qing-ling1,2(1.School of Mechanic Engineering University of Science and Technology BeiJing,BeiJing 100083,China;2.School of Mathematic-inforEngineering LangFang Normal College,HeBei LangFang 065000,China);Different Loading Mode Impacting On The Spring Constant Of Microcantilever[J];Machine Design & Research;2008-03
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 ZHOU Hong a , LAI Jian-jun a,b , ZHAO Yue a , KE Cai-jun a,b , ZHANG Kun 2 , YI Xin-jian a,b (1.a.Department of Optoelectronic Engineering;b.The State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074, China; 2.The 44th Electronic Research Institute, Chongqing 400060,China);Study on Reactive Ion Etching of Silicon in SF_6/O_2/CHF_3 Mixtures[J];Semiconductor Technology;2005-06
2 YU Guo-bin,YAO Han-min,HU Song,CHEN Xing-jun (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu610209,China);Application of DUV deep lithography in LIGA process[J];Semiconductor Information;2002-04
3 LI Yan ning,TANG Jie,RAO Zhi jun,SONG Xiao hui, HU Xiao dong,FU Xing,HU Xiao tang (State Key Lab of Precision Measuring Technology & Instrument Tianjin,University,Tianjin 300072,China);Applications of pulsed laser microfabrication technology in MEMS[J];Micronanoelectronic Technology;2003-Z1
4 Sun Jing Kang Lin Liu Xi ZHao SHao-Qi Ji ZHeng-Ming Wu Pei-Heng Hao Xi-Ping Research Institute of Superconductor Electronics, Department of Electronic Science and Engineering, Nanjing University, 210093;THE RESEARCH OF REACTION ION ETCHING AND ION ETCHING METHODS[J];Chinese Journal of Low Temperature Physics;2006-03
5 Li Faning,Zhang Heming,Dai Xianying,Zhu Guoliang,Lv Yi (Research Inst. of Microelectronics, Xidian Univ., Xi’an 710071, China);Wide Bandgap Diamond Semiconductor[J];It Age;2004-07
6 Deng Guifang; Zhang Keqian;Wang Jiangru; Ying Genyu (Departement of Electronic Enginerring, Tsinghua University, Beijing 100084);The Application of LMIS-FIB in Micro/Nano Technology[J];ACTA ELECTRONICA SINICA;1999-06
7 WANG Yang yuan,WU Guo ying,HAO Yi long,ZHANG Da cheng, XIAO Zhi xiong,LI Ting,ZHANG Guo bing,ZHANG Jin wen(Institute of Microelectronics,Peking University,Beijing 100871,China);Study of Silicon-Based MEMS Technology and Its Standard Process[J];Acta Electronica Sinica;2002-11
8 G.Yuan\ Y.Jin\ C.Jin\ B.Zhang\ H.Jiang\ T.Zhou\ Y.Ning\ H.Jing\ X.Zhu (Changchun Institute of Physics,Chinese Academy of Sciences,Changchun 130021) C.Gu\ Q.Meng (State Key Laboratory for Superhard Materials,Institute of Atomic and Molecular Physics,J;Preparation of Diamond Cold Cathode by CVD Technique[J];JOURNAL OF CHINESE ELECTRON MICROSCOPY SOCIETY;1997-04
9 YANG Baohe1,2, SUN Wei2, SUN Yicai1, LI Yan2, Chang Ming2(1Hebei University of Technology,Tianjin 300130,China; 2Tianjin University of Technology,Tianjin 300191,China);Optimizing Design of Diamond Film Pressure Sensors[J];Journal of Optoelectronics.laser;2003-05
10 YANG Baohe1,2, SUN Yicai1, SUJN Wei2, LY Yan2, PAN Peng2, CHANG Ming2 (1.Hebei University of Technology,Tianjin,300130,China; 2.Tianjin University of Technology,Tianjin 300191,China);Optimizing Design of Diamond Film Pressure Sensor(Ⅱ)[J];Journal of Optoelectronics.laser;2003-07
【Secondary Citations】
Chinese Journal Full-text Database 3 Hits
1 Gu Guotuan 1,2 Zhang Zhijun\+2 Dang Hongxin 1,2 (1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China; 2.Key Laboratory of Lubrication and Functional Mater;Fabrications and Applications of Low Surface Free Energy Surfaces[J];Progress In Chemistry;2002-03
2 Wen Shizhu(Qinghua vnhoisy);CENTURIAL REVIEW AND PROSPECT──THE DEVELOPMENT TENDENCY OF TRIBOLOGY[J];CHINESE JOURNAL OF MECHANICAL ENGINEERING;2000-06
3 Zhao Yapu Wang Lisen Sun Kehao (LNM, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, China; State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China);TABOR NUMBER, ADHESION PARAMETER AND ELASTIC THEORY OF MICROSCALE ADHESIVE CONTACT[J];Advances In Mechanics;2000-04
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