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Finite_Element Models and Dynamic Analysis of Micro Silicon Accelerometer

Li Ming Zhou Bailing (Department of Instrument Science and Engineering, Southeast University, Nanjing 210096)  
Micro silicon accelerometer should be dynamically analyzed and simulated early in the design phase due to the high requirement of dynamic performance and special micro fabrication techniques. A 3D finite_element model of micro silicon accelerometer is built and mode_frequency is computed. Further more, dynamic character such as transient response and spectrum is researched.
【Fund】: 国防科技预研基金
【CateGory Index】: U666.123
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