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《JOURNAL OF SOUTHEAST UNIVWRSITY(NATURAL SCIENCE EDITION)》 1999-05
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Finite_Element Models and Dynamic Analysis of Micro Silicon Accelerometer

Li Ming Zhou Bailing (Department of Instrument Science and Engineering, Southeast University, Nanjing 210096)  
Micro silicon accelerometer should be dynamically analyzed and simulated early in the design phase due to the high requirement of dynamic performance and special micro fabrication techniques. A 3D finite_element model of micro silicon accelerometer is built and mode_frequency is computed. Further more, dynamic character such as transient response and spectrum is researched.
【Fund】: 国防科技预研基金
【CateGory Index】: U666.123
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【References】
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1 DU Min1,LIN Wei1,LU Peng1,LI Jianli2(1.Institute of Disaster-prevention Science and Technology,Sanhe 065201,China;2.Beijing University ofAeronautics and Astronautics,Beijing 100083,China);Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement[J];Journal of Earthquake Engineering and Engineering Vibration;2007-06
【Co-citations】
Chinese Journal Full-text Database 2 Hits
1 LIU Chang-le, WU Song-tao, YU Jie (Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031);Structure dynamic analysis of neutron shielding component for ITER vacuum vessel[J];Nuclear Fusion and Plasma Physics;2009-02
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【Co-references】
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1 ZHANG Wei,ZHANG Da-cheng,WANG Yang-Yuan (Institute of Microelectronics,Peking University,Beijing100871,China);Survey and development of MEMS[J];Semiconductor Information;2002-01
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【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 MENG Mei-yu,LIU Jun,SHI Yun-bo (National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China);Structure mechanics analysis on three-axis piezoresistive micro accelerometer[J];Journal of Chinese Inertial Technology;2007-03
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