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《Electronic Components and Materials》 2009-02
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Effects of electrode materials on the force sensitive characteristic of integrated resonator

HUO Jing1, TIAN Wenjie1, TIAN Shuang1, ZOU Shufang2 (1. The Key Laboratory for Sensor, Beijing Information Science & Technology University, Beijing 100101, China; 2. Yunnan Radio & TV University, Kunming 650000, China)  
The integrated three-electrode resonator was designed and fabricated on the same wafer. The relation of the resonators' the force sensitive characteristic with adding force azimuth was studied and comparing experiments of the resonators with Au or Al electodes were carried on. The results show that the resonators' force sensitive characteristic is closely related to adding force azimuth. When ψ is 0°, the force sensitive coefficient is maximum; and the electrode materials affect the resonators' force frequency characteristic through to effect its effective electro-mechanical coupling coefficient. Force-sensitive coefficient of integrated resonator with Au electrode is 189.8 Hz/N higher than that of Al electrode.
【Fund】: 北京市自然科学基金资助项目(No.4082011);; 北京(传感器)重点实验室开放课题基金资助项目(No.KM200710772022)
【CateGory Index】: TN75
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