Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Electronic Components and Materials》 2011-10
Add to Favorite Get Latest Update

Influence of substrate temperature on performance of Al_2O_3-doped ZnO transparent conductive thin films

TIAN Li,CHEN Shan,JIANG Mati,LIAN Shuhua,TANG Shihong(College of Physics Science and Information Engineering,Jishou University,Jishou 416000,Hunan Province,China)  
Aluminum oxide-doped zinc oxide(AZO) thin films were prepared on glass substrates by radio frequency(RF) magnetron sputtering.High purity(99.9%) metallic ZnO:Al2O3(w(ZnO)=98%,w(Al2O3)=2%) ceramic target was used as source material.The morphological structure and photoelectric properties of prepared AZO films were measured by X-ray diffractometer(XRD),scanning electron micro-scope(SEM) and ultraviolet-visible(UV-Vis) spectrophotometer,the effects of substrate temperature on prepared AZO films were analyzed from the angles of film growth mode and defect scattering.The results show that the properties of the AZO thin films are remarkably influenced by the substrate temperature when the substrate temperatures are in the range of room temperature to 300 ℃.The film prepared at the substrate temperature of 200 ℃ possesses a lowest resistivity of 2.67×10–3 Ω·cm and an average transmittance of over 85% in visible range.
【Fund】: 湖南省自然科学基金资助项目(No.2006GK3083);; 湖南省吉首大学2009研究生资助项目(No.09JDY002);; 湖南省大学生研究性学习和创新性实验计划资助项目
【CateGory Index】: TB383.2
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved