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Transparent conductive film and target material

Han Xue, Xia Hui, Wu Lijun (Beijing Research Institute of Nonferrous Metal, Beijing 100088)  
Transparent conductive film is widely used in the electrical and optical engineering fields Recently, In 2O 3 doped with Sn(ITO) become more and more popular ITO is prepared with ISO target and sputtering technology Target material of ITO with a density of 95% can be acquire by means of mixing the In 2O 3 powder made from In with SO 2, pressing and firing (12 refs )
【CateGory Index】: TM201.43
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