Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Electronic Engineer》 2008-10
Add to Favorite Get Latest Update

Difference Frequency Circuit Used to Achieve Temperature Drift Suppression of Interface Circuit in Micro-capacitive Sensors

JI Wenting,QIN Ming,HUANG Qingan (Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing 210096,China)  
In this paper,CMOS-process interface circuit of micro-capacitive sensor is introduced.The relaxation oscillator which is based on the Schmitt trigger is analyzed in detail.Using it the conversion from sensitive capacitance,reference capacitance to frequency is achieved.All kinds of common-mode interference are suppressed through the difference of two frequencies.The measured results show that the output frequency is consistent with the theoretical value.Finally,the temperature drift of the circuit was simulated and tested to verify that the difference frequency circuit can completely suppress the effect of the power supply fluctuations and hold the temperature within the accuracy limits.
【Fund】: 国家自然科学基金重点项目(90607002)
【CateGory Index】: TP212.1
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 2 Hits
1 CHENG Kun, HUANG Qing-An, QIN Ming, MAO Pan-Song(Key Laboratory of MEMS of Ministry of Education, Nanjing 210096,China);Simple Method of Improving the Differential Frequency Using D Flip-Flop[J];Chinese Journal of Electron Devices;2006-02
2 ZHANG Shengfu1,ZHANG Peng2(1.North China Spaceflight Industry College Electronics Engineering Department,Langfang065000,China;2.The Langfang Food Engineering School,Langfang 065000,China);Method of Increase Humidity Sensing Accuracy[J];Instrument Technique and Sensor;2003-08
Chinese Journal Full-text Database 10 Hits
1 YI Cuiping,BAI Fengming(School of Electronics and Information Engineering,Changchun University of Science and Technology,Changchun 130022);ZigBee-based CC2530 Granary Temperature and Humidity Monitoring System[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2011-04
2 LIU Na,HUANG Qing-an,QIN Ming (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China);Design of A Novel CMOS Capacitive Absolute Pressure Sensor[J];Chinese Journal of Sensors and Actuators;2006-05
3 WANG Bin,HUANG Xiao-dong,QIN Ming,HUANG Qing-an(Key laboratory of MEMS of Ministry of education, Nanjing 210096, China);Analysis and Improvement of an Interface Circuit of Capacitive Sensors[J];Chinese Journal of Sensors and Actuators;2008-02
4 LUO Nian-ning, CUI Sheng-min(Coll of Automobile Engin,Harbin Instuire of Techaology in Weihai,Weihai 264209,China);Design of temperature and humidity sensor for automobile climate controlling[J];Journal of Transducer Technology;2005-08
5 ZHENG Junbao,WANG Yaming,WANG Yuping,SUN Xianshui,SHI Xinzeng (College of Informatics & Electronics,Zhejiang Sci-Tech University, Hangzhou 310018,China);A Quartz Crystal Microbalance Gas Detection System Based on Microcontroller[J];Journal of Test and Measurement Technology;2009-04
6 Wang Zhaolang,Xiao Shali,Huo Chang(Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China,Chongqing University,Chongqing 400030,CHN);Research on Acoustic-optic Frequency-shift Based Receiver for Laser Communication System[J];Optoelectronic Technology;2012-01
7 XING Hongyan1,2*,PENG Jiwei1,2,Lü Wenhua1,3,XU Wei1,2,WU Xiangjuan4(1.Jiangsu Key Laboratory of Meteorological Observation and Information Processing, Nanjing University of Information Science and Technology,Nanjing 210044,China; 2.School of electronic and information engineering,Nanjing University of Information Science and Technology,Nanjing 210044,China; 3.Atmospheric Observation Technology Center,China Meteorological Administration,Beijing 100081,China; 4.Ningxia Meteorological Observation Technology Support Center,Yingchuan 750002,China);A Fusion Algorithm for Humidity Sensor Temperature Compensation[J];Chinese Journal of Sensors and Actuators;2012-12
8 CAI Bing(Department of Physics, Xiangfan College,Xiangfan 441053,China);Study of Improved Methods of Measure Precision of Humidity Sensor[J];Journal of Nanyang Teachers College;2005-03
9 Du Zhitao,Wei Hongfeng,Jiang Mingbo,Zhang Zhibiao(Beijing Institute of Applied Meteorology,Beijing 100029);Comparisons on temperature and hysteresis characteristics of three capacitive humidity sensors[J];Meteorological,Hydrological and Marine Instruments;2012-02
10 Hu Xue-mei,Qu Bao-zhong (Department of Electronic Engineering,Henan Polytechnic Institute,Nanyang,473009,China);Principle & Performance Analysis for Comb-finger Capacitive Acceleration Sensor[J];Journal of Wuhan University of Technology;2009-08
China Proceedings of conference Full-text Database 1 Hits
1 Zhang Weiyu Dong Jinfeng Zhang Guoxiong(1 State Key Lab of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China;2 Department of Electromechanical Engineering,Tianjin Agricultural University,Tianjin 300384,China);Extended condition for measuring the differential frequency by D flip-flop[A];[C];2007
Chinese Journal Full-text Database 10 Hits
1 Bian Yumin,Zheng Feng,He Hongtao(The 13th Research Institute,CETC,Shijiazhuang 050051,China);Research on Damping Characteristics of MEMS Piezoresistive Accelerometer[J];Micronanoelectronic Technology;2008-08
2 WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China);Design of Differential Capacitance Detection Circuit[J];Chinese Journal of Sensors and Actuators;2006-06
3 CHEN Wei-ping,HAN Tian,WANG Hao,CHEN Hong,LIU Xiao-wei(MEMS Center,Harbin Institute of Technology,Harbin 150001,China);Characteristics of a 2-DOF and Doubly-Decoupled Micromachined Gyroscope[J];Chinese Journal of Sensors and Actuators;2007-11
4 ZHAO Min-zhi,JI Li-min,WAN Cheng-jun (Beijing Institute of Space Long March Vehicle ,Beijing 100076,China);Technical characteristics and development summarization of native inertial instrument and meter[J];Sensor World;2009-07
5 TONG Zhi yi,ZHAO Xiao dong(The No.45 Institute Research of CETC,PingLiang,74000,China);The Situation and Development Tendency for MEMS both Domestic and Overseas[J];Equipment For Electronic Products Manufacturing;2002-04
6 LEI Xin,XIE Jin-song(Department of System Engineering of Engineering Technology,Beijing University of Aeronautics and Astronautics,Beijing 100191,China);Reliability Test Methods for MEMS Inertial Sensors[J];Electronic Product Reliability and Environmental Testing;2009-06
7 GAO Xing-jun, ZHAO Heng-hua~ (School of Mechanical Engineering, Liaoning University of Petroleum & Chemical Technology, Fushun Liaoning 113001,P.R. China) Received 19 December 2003; revised 20 March 2004; accepted 1 June 2004;Abstract of Large Finite Element Analyse Software ANSYS[J];;2004-03
8 SHI Qin, SU Yan,QIU An-ping,ZHU Xin-hua(Department of Research Center of MEMS Inertial technology,Nanjing University of Science &Technology,Nanjing 210094,China);Device level vacuum packaging technologies of MEMS gyroscopes[J];Optics and Precision Engineering;2009-08
9 Zheng Changjian Jia Moyi;High Frequency Test Circuit of Small capacitance[J];Electronic Measurement Technology;1996-01
10 CHEN Wei-ping,CHEN Hong,GUO Yu-gang,XU Peng,LIU Xiao-wei(MEMS Center,Harbin Institute of Technology,Harbin 150001,China);Doubly-Decoupling Mechanism of a Fully-Symmetrical Micromachined Gyroscope[J];Nanotechnology and Precision Engineering;2009-03
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 Zhang Zhaohua,Yue Ruifeng and Liu Litian(Institute of Microelectronics,Tsinghua University,Beijing 100084,China);A Novel Digital Accelerometer Using MOS Ring Oscillators[J];Chinese Journal of Semiconductors;2003-12
2 Peng Shaohua,Huang Qing’an,Qin Ming,and Zhang Zhongping(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China);Fabrication of CMOS Compatible One-Bodied Humidity and Temperature Sensor[J];Chinese Journal of Semiconductors;2005-07
3 CAO Zheng-jun, QIN Ming (Key Laboratory of MEMS of Ministry of Education, Southeast university,Nanjing 210096, China);Protection of Circuits in MEMS Post-Processing with ABS[J];Journal of Electron Devices;2005-02
4 CHENG Kun, QIN Ming, ZHANG Zhong-ping, HUANG Qing-an (Key Laboratory of MEMS of Ministry of Education, Nanjing 210096, China);Design and Simulation of CMOS Schmitt Trigger[J];Journal of Electron Devices;2005-03
5 LI Wan yu 1,RUAN Ai wu 2,LUO Jin sheng 3,FENG Pei de 1 (1.No 618 Research Institute, Aeronautics Industry Co , Xi’an, Shaanxi 710065; 2.Dept Automatic Control, Northwestern Polytechnical University, Xi’an, Shaanxi 71007;An Investigation into Interface Detection Technology for Micromachined Si Gyroscopes[J];MICROELECTRONICS;1999-05
6 CHENG Kun,QIN Ming,ZHANG Zhong-ping,HUANG Qing-an(Key Laboratory of MEMS under Ministry of Education,Southeast University,Nanjing,Jiangsu 210096,P.R.China);Analysis and Improvement of an Interface Circuit for Humidity Sensor[J];Microelectronics;2005-06
7 CHENG Wei, FENG Yongjian, YANG Han(Pen-Tung Sah MEMS Research Center, Xiamen University, Xiamen, 361005, China);IC Design and Test of a High Performance Operational Amplifier Applied in Certain MEMS Devices[J];Modern Electronic Technique;2003-04
8 ZHANG Shengfu1,ZHANG Peng2(1.North China Spaceflight Industry College Electronics Engineering Department,Langfang065000,China;2.The Langfang Food Engineering School,Langfang 065000,China);Method of Increase Humidity Sensing Accuracy[J];Instrument Technique and Sensor;2003-08
9 HU Ming,CUI Meng,TIAN Bin,DOU Yan-wei (School of Electronic Information Engineering, Tianjin University,Tianjin 300072,China);Present Status and Future of CMOS MEMS Technology[J];Piezoelectrics & Acoustooptics;2004-04
10 Yue Ruifeng Liu Litian(Institute of Microelectronics, Tsinghua University, Beijing 100084, China );Integrated Silicon Pressure Sensor with PMOS Ring Oscillators[J];Chinese Journal of Scientific Instrument;2002-S2
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved